Machines and apparatus used solely or principally to manufacture semiconductor boules, wafers, devices, integrated circuits or flat panel displays · 7. Allocation and Co-product Handling

7. Allocation and Co-product Handling

rule_id	Rule	source_ids
allocate_configuration	Separate configurations, fabrication/assembly/test meters and actual accepted outputs first; same-period allocation uses causal measured machine-hours or service demand, never generic catalogue throughput. Include attributable failed trials/rejects/rework in accepted-equipment burdens; paired internal transfers cancel. Recovered sale products and receiver treatment disclose separate allocation without invented avoided burdens.

8. Foreground Data Collection, Calculation, and Quality Rules

Data Collection Protocols

protocol_id	process_id	flow_role	record_type	raw_fields	collection_method	unit	frequency	temporal_coverage	site_scope	aggregation_rule	quality_evidence
cp_mass	dispatch	accepted configured machine	foreground_record	model; configuration; serial; calibrated accepted net masses; Naccepted; Dnet; included options/fills	Use calibrated traceable weighing of the accepted complete machine and its actual supplied configuration, excluding packaging, extra spare stock, rejects and consumed trials; reconcile accepted ledger and sum net masses within one configuration/period.	kg	each actual batch and matched interval	one common production period	same declared configuration and sites	per 1 kg reference flow	calibration; original receipts; own assays; acceptance/BOM; uncertainty
cp_materials	fabrication	local stock and ingredients	foreground_record	Qattr; own gross mass/assay/moisture/density; stock; returns; reactions; retained hardware; bath/coat/cleaning route	Weigh actual own stock/chemical receipts, use own grade/formulation and each stream assay to reconcile cutting/retention/reaction/recovery/waste stocks and returns; upstream embedded complete-module materials are excluded.	kg	each actual batch and matched interval	one common production period	same declared configuration and sites	per 1 kg reference flow	calibration; original receipts; own assays; acceptance/BOM; uncertainty
cp_modules	assembly	hardware and retained ingredient interfaces	foreground_record	Qattr; BOM; completion; hardware mass/length; included options/software; separate chemical formula/assay/phase; stock/return/retained fill	Hardware branch weighs or measures actual completed received/installed/returned modules and cable lengths, then documents remaining local work; embedded chemical manufacture is upstream once. Chemical-ingredient branch measures each local added gas/fill/flux separately in its own native units, with own composition/moisture/T/P/density, stocks/reactions/retention/returns. Whole module hardware mass never establishes a chemical amount; actual local joining ingredients remain separate.	native unit	each actual batch and matched interval	one common production period	same declared configuration and sites	per 1 kg reference flow	calibration; original receipts; own assays; acceptance/BOM; uncertainty
cp_tests	test	actual acceptance media	foreground_record	Qattr; test purpose/configuration; trials/repeats/failures; own chemical/gas/substrate purity/phase/provider; amount/stocks/returns; source/deposition/etch/bond/dice/growth load	Meter or weigh only observed attributable factory acceptance media and utilities, including failed/repeated tests. Measure each species, retained shipment fill and consumed/recovered/returned media independently. Supplier architecture/media listings provide no factory recipe; customer processing and later maintenance remain outside equipment manufacture.	native unit	each actual batch and matched interval	one common production period	same declared configuration and sites	per 1 kg reference flow	calibration; original receipts; own assays; acceptance/BOM; uncertainty
cp_utilities	services	factory utilities	foreground_record	Qattr; common-period imports; actual generation; exports; storage; process meters; supply/return state/enthalpy	Reconcile common-period imported and actual generated utilities against exports/storage and measured fabrication/assembly/cleanroom/test/dispatch loads; services allocate only unassigned residual. Investigate negative balances without clipping. Gross heat subtracts independently measured return mass times its own enthalpy once on the same datum; net heat never deducts twice. Keep physical water/steam separate from energy and supplier boiler fuel upstream.	native unit	each actual batch and matched interval	one common production period	same declared configuration and sites	per 1 kg reference flow	calibration; original receipts; own assays; acceptance/BOM; uncertainty
cp_dispatch	dispatch	supplied machine and packing	foreground_record	Qattr; accepted BOM/net mass; packing stock/reuse/returns; supplier/transport; actual included hardware/fill	Measure actual supplied configuration net hardware/fill through cp_mass and weigh each packing material separately with own reuse/return basis. No catalogue option, replacement list or customer operating consumable establishes shipment.	kg	each actual batch and matched interval	one common production period	same declared configuration and sites	per 1 kg reference flow	calibration; original receipts; own assays; acceptance/BOM; uncertainty
cp_wastes	residues	actual non-air transfers	foreground_record	Qattr; weighed transfers; own composition/moisture/species; stock/returns; receiver; treatment route; water fraction/density	Measure each actual external waste separately, reconcile own wet/dry/composition stocks/reuse/returns and receiver route; contained metals/fluoride differ from gross waste. Actual wastewater uses its own fraction/density/dissolved/suspended load and discharge interface. Captured/dissolved media remain non-air; external receiver emissions are upstream treatment, not fictional site releases.	kg	each actual batch and matched interval	one common production period	same declared configuration and sites	per 1 kg reference flow	calibration; original receipts; own assays; acceptance/BOM; uncertainty
cp_emissions	residues	each observed emitted species	foreground_record	Qattr; CAS/species/origin/compartment; post-control concentration; matched flow/time; T/P/wet-dry/O2/unit correction; fugitive sampling; control/byproducts	Measure actual species after configured controls as concentration times matched gas/liquid flow and same-period time with actual state corrections plus independent fugitives. Actual inlet/deposited/retained/recovered/destruction/scrubber/sludge stocks are independent; catalogue DRE and unexplained residuals never infer air. Molecular NO2 differs from NOx-equivalent; own elemental assay differs from gross oxide/PM and prevents overlap.	kg	each actual batch and matched interval	one common production period	same declared configuration and sites	per 1 kg reference flow	calibration; original receipts; own assays; acceptance/BOM; uncertainty

Calculation Rules

rule_id	Applies to	Formula or rule	Inputs	Output	source_ids
normalize_period	all inventory rows	Within one actual configuration/period divide each attributable native-unit exchange total by the sum of calibrated accepted complete-machine net masses; retain raw quantities and uncertainty.	Qattr; Dnet; cp_mass	native-unit amount per kg reference flow

Data Quality Requirements

requirement_id	Applies to	Requirement	Evidence
quality_qnd	all inventory rows	Same configuration/period Qattr includes attributable stock/assembly/cleanroom/test/reject/rework burdens; Naccepted counts accepted complete machines and Dnet sums their calibrated net masses. Per-machine exchange=Qattr/Naccepted; actual mean net mass=Dnet/Naccepted; per-kg exchange=Qattr/Dnet. Keep native numerator; no catalogue weight, process throughput or trial duration is a default.	same-configuration calibrated weighing and accepted ledger
quality_physical	all inventory rows	Every element/species term uses its own gross mass, assay, moisture/wet-dry basis, stocks/reactions/retention/returns; alloy/sludge/solution mass differs from contained elements/chemicals. Each water stream uses own water fraction/density at actual temperature, reactions, retained fill, evaporation, discharge and stocks; paired internal returns cancel.	own stream assay/stock/reaction/state measurements
quality_solvent	ipa; acetone; spentipa; ipair; acetair; wastewater	Reconcile each solvent’s own assays and stock/retained/recovered/captured/destruction/wastewater/spent-media fates against independent actual air measurement. Capture differs from destruction; non-air and unexplained residual cannot become air.	independent fate measurements
quality_gases	all inventory rows	Each factory-test gas/precursor requires actual CAS/species, phase/purity/provider/container/vaporisation and cylinder/line stock/return records. Own reaction/byproduct retention and wet-scrubber fates are independent of inlet gas or catalogue DRE. Industrial O2/protective N2 are not electronic-grade by default; electronic supply listing is not factory consumption evidence.	actual suppliers/assays/test and control records
quality_scope	reference product	Retain entire boule/wafer/device/IC/display principal-function boundary and actual supplied hardware/options/software/retained fills. PVA32-inch crucible is a size; its without-magnet weight is not general Dnet. General DI recycling/chillers/pumps/metrology and independently supplied parts require adjacent review.	actual order/BOM and primary technical originals
quality_identity	all inventory rows	Match actual published state100/type/native reference internal ID/property/unitgroup, official bilingual name, full classification/chemistry/grade/phase/provider/geography and elementary origin/compartment. Add every actual unlisted material, chemical gas/fuel/refrigerant/fill, module, blade/filter/resin, transport, waste and emission as an independently queried atomic measured exchange. Unresolved reference/components/chemicals/wastes remain gaps; missing differs from zero and not-applicable requires physical evidence.	own full direct identity and supplier/configuration evidence

9. Validation Rules

rule_id	Rule	source_ids
validate_scope	Require actual complete configured machine’s principal semiconductor boule/wafer/device/IC/display manufacturing function and equivalent bilingual one-kg net reference; reject graphite hotzone/Al-Si-Ag mixture, independent utility or customer product as full machinery proxy.	cpc
validate_makebuy	Require actual completed supply/configured BOM and local makebuy/cleanroom/test boundary; reject duplicated embedded module manufacture, assumed catalogue fill/options, customer recipes and lifetime consumables as factory burden. Include attributable failed/repeated trials and rework.	cpc; pva-cz; pva-cgs; ulvac-display; evg-bond; asml-manufacture; asml-products; asml-euv; tel-product; oxford-deposition; oxford-etch; disco-dicer; disco-water; edwards-atlas; edwards-proteus; airliquide-gases; linde-gases
validate_balances	Require own-stream element/water/solvent balances and post-control species concentration × matched flow/time/state plus independent fugitives. Utility common-period imports/actual generation/exports/storage reconcile assigned meters and only unassigned residual; gross heat deducts independent same-datum return once and net heat never twice.
validate_species	Require molecular NO2 rather than NOx-equivalent, actual Cr(VI) rather than total Cr, own contained metal rather than gross salts/oxides, and non-overlapping PM/element accounting. Prefer individually differentiated Ni/Cu species for applicable LCIA methods. Catalogue DRE and chemistry name cannot establish destruction, supply phase, purity or emitted species; captured/dissolved species stay non-air. Report actual performed/skipped checks, findings and completeness.	edwards-atlas; edwards-proteus

10. Published Dataset Profile

Field	Value
dataset_role	foreground_data_package
downstream_use	secondary_dataset; background_dataset; process; lifecyclemodel
allowed_use	Actual declared configured manufacture of principally dedicated semiconductor boule/wafer/device/IC/display machinery
excluded_use	Component/utility proxies, customer processed products/recipes, catalogue mass/performance or universal factory gas assumptions
required_metadata	All reference qualifiers, same-configuration Qattr/Naccepted/Dnet, native units and own assays/state, actual BOM/makebuy/test/provider/transport/receiver/allocation and gaps
required_quality_disclosure	Measured/estimated/missing, calibrated sampling/uncertainty, physical residuals and identity/scope gaps, actual performed/skipped check completeness
update_trigger	Machine principal function/configuration/BOM/grade/purity/phase/provider/makebuy/site/period/acceptance or treatment change

11. Data Sources

source_id	type	title	reference	used_for
cpc	official_guidance	Central Product Classification Version 3.0, Explanatory Notes	https://unstats.un.org/unsd/classifications/Econ/Download/In%20Text/CPC_Ver_3.0_Exp_Notes_30Jun2025.pdf	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
pva-cz	handbook	Czochralski Process	https://www.pvatepla.com/products-technologies/crystal-growth/czochralski-process/	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
pva-cgs	handbook	Czochralski crystal growing system CGS1218	https://www.pvatepla.com/fileadmin/sitepackage/pdf/brochures/PVA_CGS1218.pdf	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
ulvac-display	handbook	SMD vertical sputtering system	https://www.ulvac.co.jp/en/products/sputtering_system/smd-vertical/	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
evg-bond	handbook	Wafer bonding systems	https://www.evgroup.com/products/bonding/	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
asml-manufacture	handbook	Manufacturing at ASML	https://www.asml.com/careers/teams/manufacturing	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
asml-products	handbook	ASML lithography products	https://www.asml.com/en/products	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
asml-euv	handbook	EUV lithography systems	https://www.asml.com/en/products/euv-lithography-systems	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
tel-product	handbook	Semiconductor production process	https://www.tel.com/product/	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
oxford-deposition	handbook	PlasmaPro 100 ICPCVD	https://plasma.oxinst.com/products/icpcvd/plasmapro-100-icpcvd	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
oxford-etch	handbook	Deep Silicon Etch System 100	https://plasma.oxinst.com/assets/uploads/Estrelas_Brochure.pdf	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
disco-dicer	handbook	DAD3651 Automatic Dicing Saw	https://www.disco.co.jp/eg/products/dicer/dad3651.html	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
disco-water	handbook	DWR1722 DI water recycling unit	https://www.disco.co.jp/eg/products/accessory/dwr1722.html	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
edwards-atlas	handbook	Atlas combustion gas abatement	https://www.edwardsvacuum.com/en-us/semiconductor/our-products/atlas	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
edwards-proteus	handbook	Proteus plasma gas abatement	https://www.edwardsvacuum.com/en-us/semiconductor/our-products/proteus	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
airliquide-gases	handbook	Air Liquide – one supplier for gases, equipment and services: Delivering expertise to Research Centres and Universities	https://uk.airliquide.com/statics/2022-08/ra_nwe_brochure_2_0.pdf	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.
linde-gases	handbook	First choice for electronics specialty gases worldwide	https://www.linde-gas.com/products-and-services/gases/specialty-gases-for-electronics	Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor.