Machines and apparatus used solely or principally to manufacture semiconductor boules, wafers, devices, integrated circuits or flat panel displays

Lifecycle status: Candidate
Content maturity: Authored methodology
Current version: No published versionLast updated2026-10-05
Readiness: Review required

Methodology and translation states come from the source record; publishing this website does not change their review status.

Content languages

zh-CN · Aligned

Status, classification and source details

Readiness

Warnings methodology_not_reviewed Authored methodology is candidate guidance and still requires methodology review.

Classification mapping

CPC 3.0:44918 · exact

Source

library/pcrs/metal-products-machinery-and-equipment/special-purpose-machinery/machines-and-apparatus-of-a-kind-used-solely-or-principally-for-the-manufacture-of-semi-0b0922acsha256:a9d6f87caed2…

1. Scope and Applicability

This PCR covers manufacture of machines/apparatus used solely or principally for semiconductor boule or wafer production, semiconductor-device manufacture, electronic integrated-circuit manufacture or flat-panel-display manufacture. Review each supplied machine’s principal function: applicable crystal growers, semiconductor wafer preparation/dicing, deposition/sputtering, lithography, etching, cleaning and device/IC bonding equipment are distinct configurations rather than one universal fab-tool recipe. Display deposition equipment is explicitly included. Customer substrates, semiconductor devices and display panels made by the machine are not the reference product. Independently supplied parts, general-purpose pumps/chillers/water-treatment units, general testing/metrology equipment and unrelated/solar-only machines require adjacent principal-function review, rather than automatic inclusion because they serve a fab. Auxiliary electrical drives and controls do not define the manufacturing machine’s principal function.

The sources establish contrasting physical architectures and manufacturing interfaces. PVA documents its own vacuum-chamber fabrication and semiconductor CZ configurations; ASML documents supplier modules, own optical parts and cleanroom assembly/test. ULVAC display sputtering uses chamber/transport/pumping structures; Oxford demonstrates plasma/deposition, vacuum loadlocks and gas distribution; EVG covers device/IC bonding, and DISCO a configured wafer dicer. These examples establish applicable interfaces only. Factory documentation must establish the actual stock, module, local processing and acceptance-media amounts. Customer fabrication recipes, catalogue performance and life, generic machine masses and installed-base consumables are never manufacturing defaults.

2. Product Category Identity

Field	Value
canonical_pcr_id	pcr.metal-products-machinery-and-equipment.special-purpose-machinery.machines-and-apparatus-of-a-kind-used-solely-or-principally-for-the-manufacture-of-semi-0b0922ac
classification_refs	CPC 3.0 44918; full original semiconductor boule/wafer/device/IC/flat-panel-display manufacturing-machinery scope
covered_products	Actual complete principally dedicated machines across all five manufacturing objects and applicable architectures
excluded_products	Customer processed goods; independent parts; generic utility/testing units; unreviewed solar-only or unrelated machinery
representative_product	One actual accepted configured complete machine, no subtype or component proxy
production_route	Actual stock fabrication and/or bought modules; local joining/finishing/cleanroom integration; measured factory acceptance; dispatch
market_state	Accepted configured machine with declared supplied hardware/accessory/fill scope

3. Reference Flow

Field	Value
What	Actual complete accepted configured machine within the full principal-function category
How much	1 kg accepted configured-machine net mass
How well	Actual acceptance requirements and demonstrated configuration, interface cleanliness/leak/electrical/function checks; no default yield or device throughput
How long or cycle	One common equipment-manufacturing and acceptance period; no customer lifetime processing cycle
reference_flow_link	finished

Field	Value
Reference amount	1
Reference product flow	Accepted configured semiconductor or display manufacturing machine
Reference flow property	Mass `93a60a56-a3c8-11da-a746-0800200b9a66`
Reference unit group	Mass `93a60a57-a4c8-11da-a746-0800200c9a66`
Reference unit	kg
Required qualifiers	Machine model/serial/configuration; actual principal semiconductor boule/wafer/device/IC/display function and mechanism; supplied hardware/options/spares/software/retained fills; own stock/grade/purity/phase/makebuy/cleanroom route; calibrated accepted net mass/BOM; site/period/provider/transport/receiver; actual tests/rejects/rework; native units/state/assays/allocation and identity gaps

4. Measurement and Unit Rules

rule_id	Applies to	Required property	Required unit	Rule
reference_mass	reference product	Mass `93a60a56-a3c8-11da-a746-0800200b9a66`	kg	Reference is 1 kg accepted configured complete-machine net mass collected through cp_mass. Same configuration excludes packing, extra spare stock, rejects and consumed trial substrates/media.
native_amount	all inventory rows	actual native property	native unit	Retain each native numerator, including cable Length/m, compressed-air Volume/m3 and Energy; electricity conversion 3.6MJ/kWh. Actual cable kg/m, gas T/P/humidity/density and liquid concentration/density require own same-interface evidence when converting.

5. System Boundary

Boundary Abstraction

Field	Value
declared_starting_condition	Actual received stock/chemicals or completed compatible modules with documented completion
starting_condition_role	foreground_input_boundary
product_classification_scope	Entire solely/principally semiconductor boule/wafer/device/IC/display manufacturing-machine category
recursive_input_rule	External complete modules embed upstream stock/processing once; local manufacture instead accounts actual ingredients and work; pair and cancel internal transfers
upstream_dataset_requirement	Compatible state/type/native unit/chemistry/grade/phase/provider/geography and transport interface
disclosure	Actual supplied BOM/options/retained fill/software scope, makebuy/local manufacture and measured test boundary

rule_id	Rule	source_ids
boundary_makebuy	Separate complete bought power/optics/vacuum/robot/control/thermal-field modules from local stock fabrication. Component classification does not establish complete machine identity; a bought partly processed item states remaining work. Embedded module chemicals remain upstream once; local assembly ingredients are separate.	asml-manufacture; pva-cz; pva-cgs
boundary_test	Include attributable observed manufacture, cleanroom integration, inspection and actual failed/repeated acceptance trials. Separately meter retained shipped fills, consumed/returned test water/gas/chemicals/substrates and customer use. No catalogue recipe, process throughput or stated power × assumed hours establishes factory burden.	asml-manufacture; pva-cz; linde-gases
boundary_supply	PVA CGS1218 is a semiconductor example; solar-only1000PV requires review. The hotzone is 32-inch crucible capacity, not 32 crucibles; separate hotzone licence/software and included/available/excluded hardware follow actual order. Example 23000kg is without magnet and excludes concrete pedestal. DISCO DAD weight/power are example ratings; blade inclusion is actual receipt-specific. DWR1722 is an independently supplied DI accessory with optional RO and separate chiller water, not automatic complete44918 equipment; no default99.5% recovery or zero wastewater.	pva-cz; pva-cgs; disco-dicer; disco-water
boundary_gases	Air Liquide booklet concerns Research Centres and Universities and Linde lists electronic gases/supply modes. They establish possible chemical identities and supply distinctions, not factory trial adoption or recipe. Actual provider, purity, gas/liquid/solution phase, containers/vaporisation and trial records are required; industrial nitrogen/oxygen cannot automatically replace high-purity electronics gases.	airliquide-gases; linde-gases
boundary_controls	Atlas combustion and Proteus plasma are contrasting controls. Proteus does not require hydrocarbon/natural gas; destruction may yield acids captured in wet scrubbers and NOx may occur. Use actual configured control and measured species/byproducts/water/sludge; no catalogue DRE, universal fuel, disappearance assumption or captured-as-destroyed balance.	edwards-atlas; edwards-proteus

6. Process Inventory Structure

Process Map

process_id	process_name	inclusion	inclusion_condition	role	quantitative_reference
fabrication	Local structural and vacuum-part fabrication	conditional	Actual observed compatible equipment operation only; services include only unassigned residual	foreground	per 1 kg reference flow
assembly	Configured machine assembly	conditional	Actual observed compatible equipment operation only; services include only unassigned residual	foreground	per 1 kg reference flow
finish	Local joining cleaning and surface finishing	conditional	Actual observed compatible equipment operation only; services include only unassigned residual	foreground	per 1 kg reference flow
test	Actual factory inspection and acceptance trials	conditional	Actual observed compatible equipment operation only; services include only unassigned residual	foreground	per 1 kg reference flow
services	Unassigned shared factory services	conditional	Actual observed compatible equipment operation only; services include only unassigned residual	foreground	per 1 kg reference flow
dispatch	Accepted equipment dispatch and packaging	conditional	Actual observed compatible equipment operation only; services include only unassigned residual	foreground	per 1 kg reference flow
residues	Actual waste transfers and direct emissions	conditional	Actual observed compatible equipment operation only; services include only unassigned residual	foreground	per 1 kg reference flow

Process: Local structural and vacuum-part fabrication (`fabrication`)

Inputs

Product flows

Stainless steel sheet for local vacuum-chamber fabrication (`stainless`)

Actual stainless steel sheet for local vacuum-chamber fabrication crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Stainless steel sheet for local vacuum-chamber fabrication
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_materials
Sources: pva-cz; asml-manufacture

Aluminium sheet for local structural fabrication (`aluminium`)

Only actual aluminium sheet thicker than 0.2 mm with own alloy/temper/finish and supplier receipts; local cutting/forming is measured separately.

Selected flow: aluminium sheet 4f197be4-7b3b-11dd-ad8b-0800200c9a66
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_materials
Sources: pva-cz; asml-manufacture

T2 copper rod for local conductors (`copper`)

Only actual T2 rod for locally machined conductors or cooling parts, own assay/dimensions/provider; bought complete modules exclude embedded rod.

Selected flow: copper rod 776e80f1-8f0e-44ee-9a7e-baa9e747291a
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_materials
Sources: pva-cz; asml-manufacture

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Elementary flows

Process: Configured machine assembly (`assembly`)

Inputs

Product flows

Bought complete semiconductor manufacturing machine (`boughtmachine`)

Actual bought complete semiconductor manufacturing machine crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Bought complete semiconductor manufacturing machine
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Bought complete graphite thermal field (`graphite`)

Only actual bought complete graphite thermal field and exact supplied hotzone configuration, grade and hardware scope. It is a component, never the complete equipment reference; no assumed heater or crucible count.

Selected flow: Graphite thermal field b20109c6-15a3-431f-b5e5-21df0a2da18f
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Supplied fused-silica crucible (`quartz`)

Actual supplied fused-silica crucible crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Supplied fused-silica crucible
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Supplied alumina ceramic insulator (`alumina`)

Actual supplied alumina ceramic insulator crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Supplied alumina ceramic insulator
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Supplied PFA tube (`pfa`)

Actual supplied pfa tube crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Supplied PFA tube
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Supplied fluoroelastomer gasket (`viton`)

Actual supplied fluoroelastomer gasket crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Supplied fluoroelastomer gasket
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Supplied low-voltage power cable (`cable`)

Only actual <=1000 V power-cable construction and provider; measure received/cut/installed/returned Length in m. Same-construction measured kg/m is required only for physical mass reconciliation; RF cable is distinct.

Selected flow: Low-voltage cable 49101b44-20cc-46a0-adfb-af07e4cc8908
Flow property / unit: Length / m
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Supplied roller bearing (`bearing`)

Actual finished roller-bearing subtype, size, grade and supplied state; weigh received installed bearings and returns, excluding those embedded in complete bought stages or spindles.

Selected flow: Ball or roller bearings 9b10184f-db9d-4cc7-94b5-02ab19ca370d
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Supplied steel assembly screw (`screw`)

Actual finished steel assembly screw with own size/grade/finish/provider and measured installed stock/returns; no generic fastener count.

Selected flow: Steel screw 895204f6-6425-4814-afc5-cb97e530e892
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Bought complete vacuum chamber (`chamber`)

Actual bought complete vacuum chamber crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Bought complete vacuum chamber
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Bought dry vacuum pump (`drypump`)

Actual bought dry vacuum pump crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Bought dry vacuum pump
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Bought turbomolecular pump (`turbo`)

Actual bought turbomolecular pump crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Bought turbomolecular pump
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Bought RF power generator (`rf`)

Actual bought rf power generator crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Bought RF power generator
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Bought mass flow controller (`mfc`)

Actual bought mass flow controller crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Bought mass flow controller
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Bought precision wafer stage (`stage`)

Actual bought precision wafer stage crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Bought precision wafer stage
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Bought wafer handling robot (`robot`)

Actual bought wafer handling robot crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Bought wafer handling robot
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Bought industrial water chiller (`chiller`)

Only an actually included complete non-household refrigeration water-chiller interface with compatible supplier, circuit and charge. Embedded refrigerant manufacture remains upstream once; locally added fill is independently identified.

Selected flow: Refrigerating and freezing equipment and heat pumps, except household type equipment 0c1bef08-e0fc-465a-aff0-c3a43837edbc
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Bought lithography projection optics module (`optics`)

Actual bought lithography projection optics module crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Bought lithography projection optics module
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Supplied graphite resistance heater (`heater`)

Actual supplied graphite resistance heater crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Supplied graphite resistance heater
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Supplied electromagnet (`magnet`)

Actual supplied electromagnet crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Supplied electromagnet
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Supplied populated control board (`pcb`)

Actual supplied populated control board crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Supplied populated control board
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Supplied dicing saw spindle (`spindle`)

Actual supplied dicing saw spindle crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Supplied dicing saw spindle
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Retained supplied deionised-water fill (`retained_di`)

Only actual measured DI water retained within the supplied accepted configured machine, own supplier/purity/water fraction/temperature/density. Empty cooling passages or a catalogue option do not establish fill; factory-test consumption and returns are separate.

Selected flow: Deionised water 5b3acbab-2518-4406-8736-d21f222d757a
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_modules
Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Elementary flows

Process: Local joining cleaning and surface finishing (`finish`)

Inputs

Product flows

Factory process water (`water`)

Actual treated industrial process-water interface and own water quality/fraction/temperature/density, supply/return stocks and local cleaning burden; not ultrapure process water by name.

Selected flow: Process Water 94a04f7e-2d5c-41f0-b182-d54a3b373a02
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_materials
Sources: pva-cz; asml-manufacture

Local equipment-cleaning isopropanol (`ipa`)

Only actual compatible CN at-plant isopropanol supply for local equipment cleaning, own purity/water/contaminant assay; electronic-grade purity is not inferred.

Selected flow: Isopropanol a4a75541-e156-4e30-947c-ba067a682afd
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_materials
Sources: pva-cz; asml-manufacture

Local equipment-cleaning acetone (`acetone`)

Actual local equipment-cleaning acetone crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Local equipment-cleaning acetone
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_materials
Sources: pva-cz; asml-manufacture

Local surface-finishing nitric acid (`nitric`)

Only actual 40% nitric acid supplied for local equipment finishing, own concentration/provider/density and measured preparation/reaction/returns; not a universal electronic wet-clean recipe.

Selected flow: Nitric acid bf883501-c052-414e-8e21-e6f53cc257ba
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_materials
Sources: pva-cz; asml-manufacture

Local surface-finishing sulfuric acid (`acid`)

Only actual industrial sulfuric acid 93–98% supplied for local fabrication/finishing, own assay/provider and dilution; high-purity electronic supply is distinct.

Selected flow: Sulfuric acid 7ee2e3c3-bee7-4520-92b7-3e23afbfcd6f
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_materials
Sources: pva-cz; asml-manufacture

Local cleaning sodium hydroxide (`alkali`)

Only actual solid industrial NaOH 95–98%, own purity/moisture/provider and preparation records; weigh physical product, not assumed active mass.

Selected flow: Sodium hydroxide e0abcced-0611-4c24-9290-5a2c5a0c4169
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_materials
Sources: pva-cz; asml-manufacture

Local chamber-joining stainless steel welding wire (`weld`)

Actual local chamber-joining stainless steel welding wire crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface.

Selected flow: Local chamber-joining stainless steel welding wire
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_materials
Sources: pva-cz; asml-manufacture

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Elementary flows

Process: Actual factory inspection and acceptance trials (`test`)

Inputs

Product flows

Supplied indium tin oxide sputtering target (`target`)

Only actual supplied indium tin oxide sputtering target consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Supplied indium tin oxide sputtering target
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test deionised water (`di`)

Only actual factory-test DI water, matching own ion-exchange/RO supply purity, water fraction and temperature/density. Meter supply/returns, retained shipment fill and discharged test water separately; no default ultrapure specification or recovery.

Selected flow: Deionised water 5b3acbab-2518-4406-8736-d21f222d757a
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test high-purity argon gas (`argon`)

Only actual factory-test high-purity argon gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test high-purity argon gas
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test high-purity nitrogen gas (`nitrogen`)

Only actual factory-test high-purity nitrogen gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test high-purity nitrogen gas
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test helium gas (`helium`)

Only actual factory-test helium gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test helium gas
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test high-purity hydrogen gas (`hydrogen`)

Only actual factory-test high-purity hydrogen gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test high-purity hydrogen gas
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test gaseous oxygen (`oxygen`)

Only actual gaseous oxygen at-plant cryogenic air-separation supply, matched provider/purity/phase and measured factory trial receipts. This industrial interface does not establish electronic high-purity oxygen; no liquid supply without vaporisation accounting.

Selected flow: oxygen 4f19ca15-7b3b-11dd-ad8b-0800200c9a66
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test monosilane gas (`silane`)

Only actual pure monosilane SiH4 CAS7803-62-5 gas from the compatible disproportionation supply interface, own electronics-grade purity/provider/phase and cylinder consumption; not an organosilane or universal deposition recipe.

Selected flow: Silane 2b6e6900-7be6-41d1-bda9-060e8303f96f
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test ammonia gas (`ammonia`)

Only actual factory-test ammonia gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test ammonia gas
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test nitrogen trifluoride gas (`nf3`)

Only actual factory-test nitrogen trifluoride gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test nitrogen trifluoride gas
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test sulfur hexafluoride gas (`sf6`)

Only actual factory-test sulfur hexafluoride gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test sulfur hexafluoride gas
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test tetrafluoromethane gas (`cf4`)

Only actual factory-test tetrafluoromethane gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test tetrafluoromethane gas
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test octafluorocyclobutane gas (`c4f8`)

Only actual factory-test octafluorocyclobutane gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test octafluorocyclobutane gas
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test nitrous oxide gas (`n2o`)

Only actual factory-test nitrous oxide gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test nitrous oxide gas
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test tungsten hexafluoride (`wf6`)

Only actual factory-test tungsten hexafluoride consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test tungsten hexafluoride
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test dichlorosilane (`sich2`)

Only actual factory-test dichlorosilane consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test dichlorosilane
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test tetraethyl orthosilicate (`teos`)

Only actual factory-test tetraethyl orthosilicate consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test tetraethyl orthosilicate
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test aqueous hydrofluoric acid (`hf`)

Only actual factory-test aqueous hydrofluoric acid consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test aqueous hydrofluoric acid
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test 30% aqueous hydrochloric acid (`hcl`)

Only actual 30% aqueous HCl CAS7647-01-0 used in a documented factory acceptance trial, matched provider and own assay/density. It cannot stand for gaseous electronic hydrogen chloride.

Selected flow: Hydrochloric acid (30%) 56414d25-a353-4d67-b362-87212ce6011d
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test hydrogen peroxide solution (`peroxide`)

Only actual factory-test hydrogen peroxide solution consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test hydrogen peroxide solution
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test semiconductor silicon wafer (`siwafer`)

Only actual factory-test semiconductor silicon wafer consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test semiconductor silicon wafer
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-test positive photoresist (`resist`)

Only actual factory-test positive photoresist consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-test positive photoresist
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory-growth-test semiconductor polysilicon (`silicon`)

Only actual factory-growth-test semiconductor polysilicon consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory-growth-test semiconductor polysilicon
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory EUV-source-test tin rod feed (`tin`)

Only actual compatible metallic tin rod CAS7440-31-5 delivered for an observed EUV-source factory trial with measured own purity and rod-to-melt preparation. Supplier tin rod is not automatically droplet-ready feed; no catalogue pulse-rate consumption.

Selected flow: Tin Rod e9c72b13-0d60-4d67-a1c9-b0c963ec62cf
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory protective-atmosphere nitrogen (`nitrogenpurge`)

Only actual at-plant protective-atmosphere nitrogen used for equipment assembly/purge/inspection with matching provider/purity/gas state. It is not automatically high-purity deposition nitrogen.

Selected flow: Nitrogen gas 50626f35-0e0d-4139-b9f9-7e9ff238ba62
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Factory combustion-abatement natural gas (`ng`)

Only actual factory combustion-abatement natural gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy.

Selected flow: Factory combustion-abatement natural gas
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_tests
Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Elementary flows

Process: Unassigned shared factory services (`services`)

Inputs

Product flows

Factory electricity (`electricity`)

Only actual compatible CN user-side <1kV grid-average electricity, common-period fabrication/assembly/cleanroom/factory-test/dispatch meters. Reconcile imports, actual generation, exports/storage and only unassigned service residual.

Selected flow: Alternating current 50657322-939c-4829-a87b-47c093bfa6a7
Flow property / unit: Energy / kWh
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_utilities
Sources:

Factory compressed air (`air`)

Actual bought compressed-air volume with own delivery pressure/temperature/humidity and provider. Onsite compressed-air production instead counts own measured power and separate losses once.

Selected flow: Compressed air 46e2b1e4-5a4e-4579-b6a2-65b03f9ce825
Flow property / unit: Volume / m3
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_utilities
Sources:

Purchased industrial heat (`heat`)

Only matching actual CN natural-gas industrial heat supply, own supplied/returned enthalpy on one datum. Deduct gross return once; already-net heat is not reduced twice; supplier fuel stays upstream.

Selected flow: Heat, district or industrial, natural gas eb581eb3-c707-41a0-b4e6-ee1854551714
Flow property / unit: Energy / MJ
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_utilities
Sources:

Service tap water (`tap`)

Actual tap-water supplier and measured common-period service supply/returns, own water fraction/temperature/density; only unassigned shared residual, no duplicated cleaning or test water.

Selected flow: Tap water d1e0e36c-07f0-4a75-bdcb-efb5d9e2ac36
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_utilities
Sources:

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Elementary flows

Process: Accepted equipment dispatch and packaging (`dispatch`)

Inputs

Product flows

Corrugated packaging board (`board`)

Actual C/E/F corrugated board with >=80% fibre, own provider/recycled fraction and measured packing mass outside equipment Dnet.

Selected flow: Corrugated cardboard 8bde297e-98df-463f-bcb4-0db52bf6e0b5
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_dispatch
Sources: cpc; pva-cgs

LDPE packaging foil (`film`)

Only actual PE-LD non-self-adhesive/noncellular/nonreinforced/nonlaminated/unsupported foil with own thickness/grade/provider; weigh packing outside Dnet.

Selected flow: Low-density polyethylene foil (PE-LD) 2cecd3a7-d90e-44b4-aec5-1d9dfb907477
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_dispatch
Sources: cpc; pva-cgs

Dispatch wood pallet (`pallet`)

Only actual wood EURO pallet construction/provider and measured mass with documented reuse/return share, outside equipment net mass.

Selected flow: Wooden pallet (EURO) 96b2b9ac-cfb6-46bf-8ad1-c056e338950a
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_dispatch
Sources: cpc; pva-cgs

Waste flows

Elementary flows

Outputs

Product flows

Accepted configured semiconductor or display manufacturing machine (`finished`)

One complete accepted machine used solely or principally for the declared semiconductor boule/wafer/device/IC/flat-panel-display manufacturing function, calibrated configured net mass excluding packaging, rejects and consumed trial substrates/media.

Selected flow: Accepted configured semiconductor or display manufacturing machine
Flow property / unit: Mass / kg
Amount rule: 1 kg
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_dispatch
Sources: cpc; pva-cgs

Waste flows

Elementary flows

Process: Actual waste transfers and direct emissions (`residues`)

Inputs

Product flows

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Outgoing steel machining scrap (`wsteel`)

Only unprocessed actual industrial steel machining scrap leaving site, own alloy/oil/water assay, stock/returns and receiving route; internal recycled stock is separate.

Selected flow: Post-industrial steel scrap c143745d-be4f-4d8f-b403-2dcbfe685349
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_wastes
Sources: edwards-atlas; edwards-proteus

Outgoing copper machining scrap (`wcu`)

Only actual weighed copper scrap transfer compatible with hydrometallurgical receiver route, own Cu/alloy/moisture/oil composition, stock/returns and receiver records.

Selected flow: Copper Scrap 4fbbb5f1-560a-4052-ba0c-652c5dfc282e
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_wastes
Sources: edwards-atlas; edwards-proteus

Outgoing graphite machining waste (`wgraphite`)

Actual weighed outgoing graphite machining waste leaving the equipment manufacturing site: collect its own composition/moisture, stocks/returns and receiving route. The queried unmatched identity remains unavailable; non-air waste is separate from measured air.

Selected flow: Outgoing graphite machining waste
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_wastes
Sources: edwards-atlas; edwards-proteus

Outgoing waste quartz crucible (`wquartz`)

Only actual waste quartz crucible transferred after equipment factory trial or rejection, own silica/contamination/moisture assay and receiving route; no assumed lifetime replacement.

Selected flow: Waste quartz crucible 3db2ae0b-f79d-42d1-9c1f-7d9594085dbd
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_wastes
Sources: edwards-atlas; edwards-proteus

Outgoing spent isopropanol (`spentipa`)

Actual weighed outgoing spent isopropanol leaving the equipment manufacturing site: collect its own composition/moisture, stocks/returns and receiving route. The queried unmatched identity remains unavailable; non-air waste is separate from measured air.

Selected flow: Outgoing spent isopropanol
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_wastes
Sources: edwards-atlas; edwards-proteus

Outgoing industrial wastewater (`wastewater`)

Actual weighed outgoing industrial wastewater leaving the equipment manufacturing site: collect its own composition/moisture, stocks/returns and receiving route. The queried unmatched identity remains unavailable; non-air waste is separate from measured air.

Selected flow: Outgoing industrial wastewater
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_wastes
Sources: edwards-atlas; edwards-proteus

Outgoing metal hydroxide sludge (`sludge`)

Actual weighed outgoing metal hydroxide sludge leaving the equipment manufacturing site: collect its own composition/moisture, stocks/returns and receiving route. The queried unmatched identity remains unavailable; non-air waste is separate from measured air.

Selected flow: Outgoing metal hydroxide sludge
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_wastes
Sources: edwards-atlas; edwards-proteus

Outgoing calcium fluoride waste (`fluoride`)

Only actual measured calcium-fluoride waste from observed local factory-test treatment, own CaF2/moisture/contaminant assay and receiving route. Gross mixed sludge is not contained fluoride mass.

Selected flow: Calcium fluoride waste b0edd7b4-ad53-4d05-8bcd-cdb05a6eae03
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_wastes
Sources: edwards-atlas; edwards-proteus

Outgoing silicon factory-test scrap (`testwaste`)

Only actual silicon scrap transferred from factory acceptance trials, own Si/dopant/coating/moisture assay, reuse/stock/returns and receiver route; not all mixed test substrates.

Selected flow: Silicon scrap 14ed622c-2306-4edb-b860-2a0779216299
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_wastes
Sources: edwards-atlas; edwards-proteus

Transferred collected metal grinding dust (`dust`)

Actual weighed transferred collected metal grinding dust leaving the equipment manufacturing site: collect its own composition/moisture, stocks/returns and receiving route. The queried unmatched identity remains unavailable; non-air waste is separate from measured air.

Selected flow: Transferred collected metal grinding dust
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_wastes
Sources: edwards-atlas; edwards-proteus

Outgoing LDPE packaging waste (`wfilm`)

Actual weighed outgoing ldpe packaging waste leaving the equipment manufacturing site: collect its own composition/moisture, stocks/returns and receiving route. The queried unmatched identity remains unavailable; non-air waste is separate from measured air.

Selected flow: Outgoing LDPE packaging waste
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_wastes
Sources: edwards-atlas; edwards-proteus

Elementary flows

Fossil carbon dioxide to air (`co2`)

Only actual fossil carbon dioxide to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. Fossil origin must be independently documented; supplier electricity/heat emissions remain upstream.

Selected flow: carbon dioxide (fossil) 08a91e70-3ddc-11dd-923d-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Fossil carbon monoxide to air (`co`)

Only actual fossil carbon monoxide to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. Fossil origin must be independently documented; supplier electricity/heat emissions remain upstream.

Selected flow: carbon monoxide (fossil) 08a91e70-3ddc-11dd-924e-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Isopropanol to air (`ipair`)

Only actual isopropanol to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air.

Selected flow: isopropanol fe0acd60-3ddc-11dd-a843-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Acetone to air (`acetair`)

Only actual acetone to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air.

Selected flow: acetone 08a91e70-3ddc-11dd-9520-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Water vapour to air (`vapor`)

Only actual water vapour to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air.

Selected flow: water vapour fe0acd60-3ddc-11dd-ac04-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Molecular nitrogen dioxide to air (`no2`)

Only actual molecular nitrogen dioxide to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. Molecular NO2 is distinct from NOx reported as NO2-equivalent; carbon closure cannot infer it.

Selected flow: nitrogen dioxide 08a91e70-3ddc-11dd-96e5-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

PM10 to air (`pm10`)

Only actual pm10 to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. PM10 includes finer fractions; avoid double-counting constituent elemental emissions.

Selected flow: particles (PM10) 08a91e70-3ddc-11dd-91be-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Hydrogen fluoride to air (`hf_air`)

Only actual hydrogen fluoride to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air.

Selected flow: Hydrogen fluoride to air
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Hydrogen chloride to air (`hcl_air`)

Only actual hydrogen chloride to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air.

Selected flow: hydrogen chloride fe0acd60-3ddc-11dd-aab0-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Ammonia to air (`ammonia_air`)

Only actual ammonia to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air.

Selected flow: ammonia 08a91e70-3ddc-11dd-a2a9-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Nitrogen trifluoride to air (`nf3_air`)

Only actual nitrogen trifluoride to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air.

Selected flow: nitrogen trifluoride 23bfd19e-9751-4b06-81f4-93b069a3fd56
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Sulfur hexafluoride to air (`sf6_air`)

Only actual sulfur hexafluoride to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air.

Selected flow: sulphur hexafluoride fe0acd60-3ddc-11dd-ac51-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Tetrafluoromethane to air (`cf4_air`)

Only actual tetrafluoromethane to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air.

Selected flow: Tetrafluoromethane to air
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Octafluorocyclobutane to air (`c4f8_air`)

Only actual octafluorocyclobutane to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air.

Selected flow: Octafluorocyclobutane to air
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Nitrous oxide to air (`n2o_air`)

Only actual nitrous oxide to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air.

Selected flow: nitrous oxide 08a91e70-3ddc-11dd-94c3-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Copper to air (`copperair`)

Only actual copper to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. Gross alloy/oxide/salt mass differs from contained element. Native generic flow covers metal and ions; prefer separately queried matching individual species if the actual LCIA method differentiates them.

Selected flow: copper fe0acd60-3ddc-11dd-a7a0-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Hexavalent chromium to air (`chromiumair`)

Only actual hexavalent chromium to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. Own Cr(VI) assay is required, not total chromium or metallic coating mass.

Selected flow: chromium (vi) 08a91e70-3ddc-11dd-950b-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Nickel to air (`nickelair`)

Only actual nickel to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. Gross alloy/oxide/salt mass differs from contained element. Native generic flow covers metal and ions; prefer separately queried matching individual species if the actual LCIA method differentiates them.

Selected flow: nickel 08a91e70-3ddc-11dd-96c8-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass.
Value mode: foreground_record
Specificity: site_specific
Normalization basis: per 1 kg reference flow
Basis kind: process_output
Evidence kind: collected_record
Collection protocol: cp_emissions
Sources: edwards-atlas; edwards-proteus

Raw downloads

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pcr.en-US.md104 KB · a9d6f87caed2…
manifest.yaml3.0 KB · 359f526c8483…
pcr.zh-CN.md85 KB · 62b31f310b26…
structured.yaml149 KB · ee1211d27a01…

Structured rule index

This index comes from verified structured.yaml and retains the canonical English rule text.

System boundary rules · 5

Rule ID	Applies to	Rule	Source IDs
`boundary_makebuy`	foreground_system_boundary	Separate complete bought power/optics/vacuum/robot/control/thermal-field modules from local stock fabrication. Component classification does not establish complete machine identity; a bought partly processed item states remaining work. Embedded module chemicals remain upstream once; local assembly ingredients are separate.	asml-manufacture, pva-cz, pva-cgs
`boundary_test`	foreground_system_boundary	Include attributable observed manufacture, cleanroom integration, inspection and actual failed/repeated acceptance trials. Separately meter retained shipped fills, consumed/returned test water/gas/chemicals/substrates and customer use. No catalogue recipe, process throughput or stated power × assumed hours establishes factory burden.	asml-manufacture, pva-cz, linde-gases
`boundary_supply`	foreground_system_boundary	PVA CGS1218 is a semiconductor example; solar-only1000PV requires review. The hotzone is 32-inch crucible capacity, not 32 crucibles; separate hotzone licence/software and included/available/excluded hardware follow actual order. Example 23000kg is without magnet and excludes concrete pedestal. DISCO DAD weight/power are example ratings; blade inclusion is actual receipt-specific. DWR1722 is an independently supplied DI accessory with optional RO and separate chiller water, not automatic complete44918 equipment; no default99.5% recovery or zero wastewater.	pva-cz, pva-cgs, disco-dicer, disco-water
`boundary_gases`	foreground_system_boundary	Air Liquide booklet concerns Research Centres and Universities and Linde lists electronic gases/supply modes. They establish possible chemical identities and supply distinctions, not factory trial adoption or recipe. Actual provider, purity, gas/liquid/solution phase, containers/vaporisation and trial records are required; industrial nitrogen/oxygen cannot automatically replace high-purity electronics gases.	airliquide-gases, linde-gases
`boundary_controls`	foreground_system_boundary	Atlas combustion and Proteus plasma are contrasting controls. Proteus does not require hydrocarbon/natural gas; destruction may yield acids captured in wet scrubbers and NOx may occur. Use actual configured control and measured species/byproducts/water/sludge; no catalogue DRE, universal fuel, disappearance assumption or captured-as-destroyed balance.	edwards-atlas, edwards-proteus

Allocation rules · 1

Rule ID	Applies to	Rule	Source IDs
`allocate_configuration`	foreground_burden_allocation	Separate configurations, fabrication/assembly/test meters and actual accepted outputs first; same-period allocation uses causal measured machine-hours or service demand, never generic catalogue throughput. Include attributable failed trials/rejects/rework in accepted-equipment burdens; paired internal transfers cancel. Recovered sale products and receiver treatment disclose separate allocation without invented avoided burdens.

Validation rules · 4

Rule ID	Applies to	Rule	Source IDs
`validate_scope`	foreground_dataset_conformance	Require actual complete configured machine’s principal semiconductor boule/wafer/device/IC/display manufacturing function and equivalent bilingual one-kg net reference; reject graphite hotzone/Al-Si-Ag mixture, independent utility or customer product as full machinery proxy.	cpc
`validate_makebuy`	foreground_dataset_conformance	Require actual completed supply/configured BOM and local makebuy/cleanroom/test boundary; reject duplicated embedded module manufacture, assumed catalogue fill/options, customer recipes and lifetime consumables as factory burden. Include attributable failed/repeated trials and rework.	cpc, pva-cz, pva-cgs, ulvac-display, evg-bond, asml-manufacture, asml-products, asml-euv, tel-product, oxford-deposition, oxford-etch, disco-dicer, disco-water, edwards-atlas, edwards-proteus, airliquide-gases, linde-gases
`validate_balances`	foreground_dataset_conformance	Require own-stream element/water/solvent balances and post-control species concentration × matched flow/time/state plus independent fugitives. Utility common-period imports/actual generation/exports/storage reconcile assigned meters and only unassigned residual; gross heat deducts independent same-datum return once and net heat never twice.
`validate_species`	foreground_dataset_conformance	Require molecular NO2 rather than NOx-equivalent, actual Cr(VI) rather than total Cr, own contained metal rather than gross salts/oxides, and non-overlapping PM/element accounting. Prefer individually differentiated Ni/Cu species for applicable LCIA methods. Catalogue DRE and chemistry name cannot establish destruction, supply phase, purity or emitted species; captured/dissolved species stay non-air. Report actual performed/skipped checks, findings and completeness.	edwards-atlas, edwards-proteus

Processes and inputs/outputs · 7

Process ID	Process name	Input flows	Output flows
`fabrication`	Local structural and vacuum-part fabrication	3	0
`assembly`	Configured machine assembly	23	0
`finish`	Local joining cleaning and surface finishing	7	0
`test`	Actual factory inspection and acceptance trials	26	0
`services`	Unassigned shared factory services	4	0
`dispatch`	Accepted equipment dispatch and packaging	3	1
`residues`	Actual waste transfers and direct emissions	0	29

Complete field inspector

Loads this record’s complete manifest and structured projection on demand; values are never truncated. Requires JavaScript.

Machines and apparatus used solely or principally to manufacture semiconductor boules, wafers, devices, integrated circuits or flat panel displays

Content languages

Readiness

Classification mapping

Source

1. Scope and Applicability

2. Product Category Identity

3. Reference Flow

4. Measurement and Unit Rules

5. System Boundary

Boundary Abstraction

6. Process Inventory Structure

Process Map

Process: Local structural and vacuum-part fabrication (fabrication)

Inputs

Product flows

Stainless steel sheet for local vacuum-chamber fabrication (stainless)

Aluminium sheet for local structural fabrication (aluminium)

T2 copper rod for local conductors (copper)

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Elementary flows

Process: Configured machine assembly (assembly)

Inputs

Product flows

Bought complete semiconductor manufacturing machine (boughtmachine)

Bought complete graphite thermal field (graphite)

Supplied fused-silica crucible (quartz)

Supplied alumina ceramic insulator (alumina)

Supplied PFA tube (pfa)

Supplied fluoroelastomer gasket (viton)

Supplied low-voltage power cable (cable)

Supplied roller bearing (bearing)

Supplied steel assembly screw (screw)

Bought complete vacuum chamber (chamber)

Bought dry vacuum pump (drypump)

Bought turbomolecular pump (turbo)

Bought RF power generator (rf)

Bought mass flow controller (mfc)

Bought precision wafer stage (stage)

Bought wafer handling robot (robot)

Bought industrial water chiller (chiller)

Bought lithography projection optics module (optics)

Supplied graphite resistance heater (heater)

Supplied electromagnet (magnet)

Supplied populated control board (pcb)

Supplied dicing saw spindle (spindle)

Retained supplied deionised-water fill (retained_di)

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Elementary flows

Process: Local joining cleaning and surface finishing (finish)

Inputs

Product flows

Factory process water (water)

Local equipment-cleaning isopropanol (ipa)

Local equipment-cleaning acetone (acetone)

Local surface-finishing nitric acid (nitric)

Local surface-finishing sulfuric acid (acid)

Local cleaning sodium hydroxide (alkali)

Local chamber-joining stainless steel welding wire (weld)

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Elementary flows

Process: Actual factory inspection and acceptance trials (test)

Inputs

Product flows

Supplied indium tin oxide sputtering target (target)

Factory-test deionised water (di)

Factory-test high-purity argon gas (argon)

Factory-test high-purity nitrogen gas (nitrogen)

Process: Local structural and vacuum-part fabrication (`fabrication`)

Stainless steel sheet for local vacuum-chamber fabrication (`stainless`)

Aluminium sheet for local structural fabrication (`aluminium`)

T2 copper rod for local conductors (`copper`)

Process: Configured machine assembly (`assembly`)

Bought complete semiconductor manufacturing machine (`boughtmachine`)

Bought complete graphite thermal field (`graphite`)

Supplied fused-silica crucible (`quartz`)

Supplied alumina ceramic insulator (`alumina`)

Supplied PFA tube (`pfa`)

Supplied fluoroelastomer gasket (`viton`)

Supplied low-voltage power cable (`cable`)

Supplied roller bearing (`bearing`)

Supplied steel assembly screw (`screw`)

Bought complete vacuum chamber (`chamber`)

Bought dry vacuum pump (`drypump`)

Bought turbomolecular pump (`turbo`)

Bought RF power generator (`rf`)

Bought mass flow controller (`mfc`)

Bought precision wafer stage (`stage`)

Bought wafer handling robot (`robot`)

Bought industrial water chiller (`chiller`)

Bought lithography projection optics module (`optics`)

Supplied graphite resistance heater (`heater`)

Supplied electromagnet (`magnet`)

Supplied populated control board (`pcb`)

Supplied dicing saw spindle (`spindle`)

Retained supplied deionised-water fill (`retained_di`)

Process: Local joining cleaning and surface finishing (`finish`)

Factory process water (`water`)

Local equipment-cleaning isopropanol (`ipa`)

Local equipment-cleaning acetone (`acetone`)

Local surface-finishing nitric acid (`nitric`)

Local surface-finishing sulfuric acid (`acid`)

Local cleaning sodium hydroxide (`alkali`)

Local chamber-joining stainless steel welding wire (`weld`)

Process: Actual factory inspection and acceptance trials (`test`)

Supplied indium tin oxide sputtering target (`target`)

Factory-test deionised water (`di`)

Factory-test high-purity argon gas (`argon`)

Factory-test high-purity nitrogen gas (`nitrogen`)

Factory-test helium gas (`helium`)

Factory-test high-purity hydrogen gas (`hydrogen`)

Factory-test gaseous oxygen (`oxygen`)

Factory-test monosilane gas (`silane`)

Factory-test ammonia gas (`ammonia`)

Factory-test nitrogen trifluoride gas (`nf3`)

Factory-test sulfur hexafluoride gas (`sf6`)

Factory-test tetrafluoromethane gas (`cf4`)

Factory-test octafluorocyclobutane gas (`c4f8`)

Factory-test nitrous oxide gas (`n2o`)

Factory-test tungsten hexafluoride (`wf6`)

Factory-test dichlorosilane (`sich2`)

Factory-test tetraethyl orthosilicate (`teos`)

Factory-test aqueous hydrofluoric acid (`hf`)

Factory-test 30% aqueous hydrochloric acid (`hcl`)

Factory-test hydrogen peroxide solution (`peroxide`)

Factory-test semiconductor silicon wafer (`siwafer`)

Factory-test positive photoresist (`resist`)

Factory-growth-test semiconductor polysilicon (`silicon`)

Factory EUV-source-test tin rod feed (`tin`)

Factory protective-atmosphere nitrogen (`nitrogenpurge`)

Factory combustion-abatement natural gas (`ng`)

Process: Unassigned shared factory services (`services`)

Factory electricity (`electricity`)

Factory compressed air (`air`)

Purchased industrial heat (`heat`)

Service tap water (`tap`)

Process: Accepted equipment dispatch and packaging (`dispatch`)

Corrugated packaging board (`board`)

LDPE packaging foil (`film`)

Dispatch wood pallet (`pallet`)

Accepted configured semiconductor or display manufacturing machine (`finished`)

Process: Actual waste transfers and direct emissions (`residues`)

Outgoing steel machining scrap (`wsteel`)

Outgoing copper machining scrap (`wcu`)

Outgoing graphite machining waste (`wgraphite`)

Outgoing waste quartz crucible (`wquartz`)

Outgoing spent isopropanol (`spentipa`)

Outgoing industrial wastewater (`wastewater`)