--- pcr_id: pcr.metal-products-machinery-and-equipment.special-purpose-machinery.machines-and-apparatus-of-a-kind-used-solely-or-principally-for-the-manufacture-of-semi-0b0922ac language: en-US status: candidate content_maturity: authored_methodology sync_with: pcr.zh-CN.md --- # Machines and apparatus used solely or principally to manufacture semiconductor boules, wafers, devices, integrated circuits or flat panel displays ## 1. Scope and Applicability This PCR covers manufacture of machines/apparatus used solely or principally for semiconductor boule or wafer production, semiconductor-device manufacture, electronic integrated-circuit manufacture or flat-panel-display manufacture. Review each supplied machine’s principal function: applicable crystal growers, semiconductor wafer preparation/dicing, deposition/sputtering, lithography, etching, cleaning and device/IC bonding equipment are distinct configurations rather than one universal fab-tool recipe. Display deposition equipment is explicitly included. Customer substrates, semiconductor devices and display panels made by the machine are not the reference product. Independently supplied parts, general-purpose pumps/chillers/water-treatment units, general testing/metrology equipment and unrelated/solar-only machines require adjacent principal-function review, rather than automatic inclusion because they serve a fab. Auxiliary electrical drives and controls do not define the manufacturing machine’s principal function. The sources establish contrasting physical architectures and manufacturing interfaces. PVA documents its own vacuum-chamber fabrication and semiconductor CZ configurations; ASML documents supplier modules, own optical parts and cleanroom assembly/test. ULVAC display sputtering uses chamber/transport/pumping structures; Oxford demonstrates plasma/deposition, vacuum loadlocks and gas distribution; EVG covers device/IC bonding, and DISCO a configured wafer dicer. These examples establish applicable interfaces only. Factory documentation must establish the actual stock, module, local processing and acceptance-media amounts. Customer fabrication recipes, catalogue performance and life, generic machine masses and installed-base consumables are never manufacturing defaults. ## 2. Product Category Identity | Field | Value | | --- | --- | | canonical_pcr_id | pcr.metal-products-machinery-and-equipment.special-purpose-machinery.machines-and-apparatus-of-a-kind-used-solely-or-principally-for-the-manufacture-of-semi-0b0922ac | | classification_refs | CPC 3.0 44918; full original semiconductor boule/wafer/device/IC/flat-panel-display manufacturing-machinery scope | | covered_products | Actual complete principally dedicated machines across all five manufacturing objects and applicable architectures | | excluded_products | Customer processed goods; independent parts; generic utility/testing units; unreviewed solar-only or unrelated machinery | | representative_product | One actual accepted configured complete machine, no subtype or component proxy | | production_route | Actual stock fabrication and/or bought modules; local joining/finishing/cleanroom integration; measured factory acceptance; dispatch | | market_state | Accepted configured machine with declared supplied hardware/accessory/fill scope | ## 3. Reference Flow | Field | Value | | --- | --- | | What | Actual complete accepted configured machine within the full principal-function category | | How much | 1 kg accepted configured-machine net mass | | How well | Actual acceptance requirements and demonstrated configuration, interface cleanliness/leak/electrical/function checks; no default yield or device throughput | | How long or cycle | One common equipment-manufacturing and acceptance period; no customer lifetime processing cycle | | reference_flow_link | finished | | Field | Value | | --- | --- | | Reference amount | 1 | | Reference product flow | Accepted configured semiconductor or display manufacturing machine | | Reference flow property | Mass `93a60a56-a3c8-11da-a746-0800200b9a66` | | Reference unit group | Mass `93a60a57-a4c8-11da-a746-0800200c9a66` | | Reference unit | kg | | Required qualifiers | Machine model/serial/configuration; actual principal semiconductor boule/wafer/device/IC/display function and mechanism; supplied hardware/options/spares/software/retained fills; own stock/grade/purity/phase/makebuy/cleanroom route; calibrated accepted net mass/BOM; site/period/provider/transport/receiver; actual tests/rejects/rework; native units/state/assays/allocation and identity gaps | ## 4. Measurement and Unit Rules | rule_id | Applies to | Required property | Required unit | Rule | | --- | --- | --- | --- | --- | | reference_mass | reference product | Mass `93a60a56-a3c8-11da-a746-0800200b9a66` | kg | Reference is 1 kg accepted configured complete-machine net mass collected through cp_mass. Same configuration excludes packing, extra spare stock, rejects and consumed trial substrates/media. | | native_amount | all inventory rows | actual native property | native unit | Retain each native numerator, including cable Length/m, compressed-air Volume/m3 and Energy; electricity conversion 3.6MJ/kWh. Actual cable kg/m, gas T/P/humidity/density and liquid concentration/density require own same-interface evidence when converting. | ## 5. System Boundary ### Boundary Abstraction | Field | Value | | --- | --- | | declared_starting_condition | Actual received stock/chemicals or completed compatible modules with documented completion | | starting_condition_role | foreground_input_boundary | | product_classification_scope | Entire solely/principally semiconductor boule/wafer/device/IC/display manufacturing-machine category | | recursive_input_rule | External complete modules embed upstream stock/processing once; local manufacture instead accounts actual ingredients and work; pair and cancel internal transfers | | upstream_dataset_requirement | Compatible state/type/native unit/chemistry/grade/phase/provider/geography and transport interface | | disclosure | Actual supplied BOM/options/retained fill/software scope, makebuy/local manufacture and measured test boundary | | rule_id | Rule | source_ids | | --- | --- | --- | | boundary_makebuy | Separate complete bought power/optics/vacuum/robot/control/thermal-field modules from local stock fabrication. Component classification does not establish complete machine identity; a bought partly processed item states remaining work. Embedded module chemicals remain upstream once; local assembly ingredients are separate. | asml-manufacture; pva-cz; pva-cgs | | boundary_test | Include attributable observed manufacture, cleanroom integration, inspection and actual failed/repeated acceptance trials. Separately meter retained shipped fills, consumed/returned test water/gas/chemicals/substrates and customer use. No catalogue recipe, process throughput or stated power × assumed hours establishes factory burden. | asml-manufacture; pva-cz; linde-gases | | boundary_supply | PVA CGS1218 is a semiconductor example; solar-only1000PV requires review. The hotzone is 32-inch crucible capacity, not 32 crucibles; separate hotzone licence/software and included/available/excluded hardware follow actual order. Example 23000kg is without magnet and excludes concrete pedestal. DISCO DAD weight/power are example ratings; blade inclusion is actual receipt-specific. DWR1722 is an independently supplied DI accessory with optional RO and separate chiller water, not automatic complete44918 equipment; no default99.5% recovery or zero wastewater. | pva-cz; pva-cgs; disco-dicer; disco-water | | boundary_gases | Air Liquide booklet concerns Research Centres and Universities and Linde lists electronic gases/supply modes. They establish possible chemical identities and supply distinctions, not factory trial adoption or recipe. Actual provider, purity, gas/liquid/solution phase, containers/vaporisation and trial records are required; industrial nitrogen/oxygen cannot automatically replace high-purity electronics gases. | airliquide-gases; linde-gases | | boundary_controls | Atlas combustion and Proteus plasma are contrasting controls. Proteus does not require hydrocarbon/natural gas; destruction may yield acids captured in wet scrubbers and NOx may occur. Use actual configured control and measured species/byproducts/water/sludge; no catalogue DRE, universal fuel, disappearance assumption or captured-as-destroyed balance. | edwards-atlas; edwards-proteus | ## 6. Process Inventory Structure ### Process Map | process_id | process_name | inclusion | inclusion_condition | role | quantitative_reference | | --- | --- | --- | --- | --- | --- | | fabrication | Local structural and vacuum-part fabrication | conditional | Actual observed compatible equipment operation only; services include only unassigned residual | foreground | per 1 kg reference flow | | assembly | Configured machine assembly | conditional | Actual observed compatible equipment operation only; services include only unassigned residual | foreground | per 1 kg reference flow | | finish | Local joining cleaning and surface finishing | conditional | Actual observed compatible equipment operation only; services include only unassigned residual | foreground | per 1 kg reference flow | | test | Actual factory inspection and acceptance trials | conditional | Actual observed compatible equipment operation only; services include only unassigned residual | foreground | per 1 kg reference flow | | services | Unassigned shared factory services | conditional | Actual observed compatible equipment operation only; services include only unassigned residual | foreground | per 1 kg reference flow | | dispatch | Accepted equipment dispatch and packaging | conditional | Actual observed compatible equipment operation only; services include only unassigned residual | foreground | per 1 kg reference flow | | residues | Actual waste transfers and direct emissions | conditional | Actual observed compatible equipment operation only; services include only unassigned residual | foreground | per 1 kg reference flow | ### Process: Local structural and vacuum-part fabrication (`fabrication`) #### Inputs ##### Product flows ###### Stainless steel sheet for local vacuum-chamber fabrication (`stainless`) Actual stainless steel sheet for local vacuum-chamber fabrication crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Stainless steel sheet for local vacuum-chamber fabrication - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_materials - Sources: pva-cz; asml-manufacture ###### Aluminium sheet for local structural fabrication (`aluminium`) Only actual aluminium sheet thicker than 0.2 mm with own alloy/temper/finish and supplier receipts; local cutting/forming is measured separately. - Selected flow: aluminium sheet `4f197be4-7b3b-11dd-ad8b-0800200c9a66` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_materials - Sources: pva-cz; asml-manufacture ###### T2 copper rod for local conductors (`copper`) Only actual T2 rod for locally machined conductors or cooling parts, own assay/dimensions/provider; bought complete modules exclude embedded rod. - Selected flow: copper rod `776e80f1-8f0e-44ee-9a7e-baa9e747291a` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_materials - Sources: pva-cz; asml-manufacture ##### Waste flows ##### Elementary flows #### Outputs ##### Product flows ##### Waste flows ##### Elementary flows ### Process: Configured machine assembly (`assembly`) #### Inputs ##### Product flows ###### Bought complete semiconductor manufacturing machine (`boughtmachine`) Actual bought complete semiconductor manufacturing machine crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Bought complete semiconductor manufacturing machine - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Bought complete graphite thermal field (`graphite`) Only actual bought complete graphite thermal field and exact supplied hotzone configuration, grade and hardware scope. It is a component, never the complete equipment reference; no assumed heater or crucible count. - Selected flow: Graphite thermal field `b20109c6-15a3-431f-b5e5-21df0a2da18f` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Supplied fused-silica crucible (`quartz`) Actual supplied fused-silica crucible crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Supplied fused-silica crucible - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Supplied alumina ceramic insulator (`alumina`) Actual supplied alumina ceramic insulator crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Supplied alumina ceramic insulator - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Supplied PFA tube (`pfa`) Actual supplied pfa tube crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Supplied PFA tube - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Supplied fluoroelastomer gasket (`viton`) Actual supplied fluoroelastomer gasket crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Supplied fluoroelastomer gasket - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Supplied low-voltage power cable (`cable`) Only actual <=1000 V power-cable construction and provider; measure received/cut/installed/returned Length in m. Same-construction measured kg/m is required only for physical mass reconciliation; RF cable is distinct. - Selected flow: Low-voltage cable `49101b44-20cc-46a0-adfb-af07e4cc8908` - Flow property / unit: Length / m - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Supplied roller bearing (`bearing`) Actual finished roller-bearing subtype, size, grade and supplied state; weigh received installed bearings and returns, excluding those embedded in complete bought stages or spindles. - Selected flow: Ball or roller bearings `9b10184f-db9d-4cc7-94b5-02ab19ca370d` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Supplied steel assembly screw (`screw`) Actual finished steel assembly screw with own size/grade/finish/provider and measured installed stock/returns; no generic fastener count. - Selected flow: Steel screw `895204f6-6425-4814-afc5-cb97e530e892` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Bought complete vacuum chamber (`chamber`) Actual bought complete vacuum chamber crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Bought complete vacuum chamber - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Bought dry vacuum pump (`drypump`) Actual bought dry vacuum pump crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Bought dry vacuum pump - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Bought turbomolecular pump (`turbo`) Actual bought turbomolecular pump crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Bought turbomolecular pump - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Bought RF power generator (`rf`) Actual bought rf power generator crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Bought RF power generator - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Bought mass flow controller (`mfc`) Actual bought mass flow controller crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Bought mass flow controller - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Bought precision wafer stage (`stage`) Actual bought precision wafer stage crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Bought precision wafer stage - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Bought wafer handling robot (`robot`) Actual bought wafer handling robot crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Bought wafer handling robot - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Bought industrial water chiller (`chiller`) Only an actually included complete non-household refrigeration water-chiller interface with compatible supplier, circuit and charge. Embedded refrigerant manufacture remains upstream once; locally added fill is independently identified. - Selected flow: Refrigerating and freezing equipment and heat pumps, except household type equipment `0c1bef08-e0fc-465a-aff0-c3a43837edbc` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Bought lithography projection optics module (`optics`) Actual bought lithography projection optics module crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Bought lithography projection optics module - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Supplied graphite resistance heater (`heater`) Actual supplied graphite resistance heater crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Supplied graphite resistance heater - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Supplied electromagnet (`magnet`) Actual supplied electromagnet crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Supplied electromagnet - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Supplied populated control board (`pcb`) Actual supplied populated control board crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Supplied populated control board - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Supplied dicing saw spindle (`spindle`) Actual supplied dicing saw spindle crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Supplied dicing saw spindle - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ###### Retained supplied deionised-water fill (`retained_di`) Only actual measured DI water retained within the supplied accepted configured machine, own supplier/purity/water fraction/temperature/density. Empty cooling passages or a catalogue option do not establish fill; factory-test consumption and returns are separate. - Selected flow: Deionised water `5b3acbab-2518-4406-8736-d21f222d757a` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_modules - Sources: pva-cgs; ulvac-display; evg-bond; asml-euv; oxford-etch; disco-dicer ##### Waste flows ##### Elementary flows #### Outputs ##### Product flows ##### Waste flows ##### Elementary flows ### Process: Local joining cleaning and surface finishing (`finish`) #### Inputs ##### Product flows ###### Factory process water (`water`) Actual treated industrial process-water interface and own water quality/fraction/temperature/density, supply/return stocks and local cleaning burden; not ultrapure process water by name. - Selected flow: Process Water `94a04f7e-2d5c-41f0-b182-d54a3b373a02` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_materials - Sources: pva-cz; asml-manufacture ###### Local equipment-cleaning isopropanol (`ipa`) Only actual compatible CN at-plant isopropanol supply for local equipment cleaning, own purity/water/contaminant assay; electronic-grade purity is not inferred. - Selected flow: Isopropanol `a4a75541-e156-4e30-947c-ba067a682afd` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_materials - Sources: pva-cz; asml-manufacture ###### Local equipment-cleaning acetone (`acetone`) Actual local equipment-cleaning acetone crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Local equipment-cleaning acetone - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_materials - Sources: pva-cz; asml-manufacture ###### Local surface-finishing nitric acid (`nitric`) Only actual 40% nitric acid supplied for local equipment finishing, own concentration/provider/density and measured preparation/reaction/returns; not a universal electronic wet-clean recipe. - Selected flow: Nitric acid `bf883501-c052-414e-8e21-e6f53cc257ba` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_materials - Sources: pva-cz; asml-manufacture ###### Local surface-finishing sulfuric acid (`acid`) Only actual industrial sulfuric acid 93–98% supplied for local fabrication/finishing, own assay/provider and dilution; high-purity electronic supply is distinct. - Selected flow: Sulfuric acid `7ee2e3c3-bee7-4520-92b7-3e23afbfcd6f` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_materials - Sources: pva-cz; asml-manufacture ###### Local cleaning sodium hydroxide (`alkali`) Only actual solid industrial NaOH 95–98%, own purity/moisture/provider and preparation records; weigh physical product, not assumed active mass. - Selected flow: Sodium hydroxide `e0abcced-0611-4c24-9290-5a2c5a0c4169` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_materials - Sources: pva-cz; asml-manufacture ###### Local chamber-joining stainless steel welding wire (`weld`) Actual local chamber-joining stainless steel welding wire crossing the declared equipment-fabrication or assembly boundary; record own grade/completion/dimensions/provider, measured stock and returns. Complete bought modules embed their manufacture once; an unmatched generic component does not establish this interface. - Selected flow: Local chamber-joining stainless steel welding wire - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_materials - Sources: pva-cz; asml-manufacture ##### Waste flows ##### Elementary flows #### Outputs ##### Product flows ##### Waste flows ##### Elementary flows ### Process: Actual factory inspection and acceptance trials (`test`) #### Inputs ##### Product flows ###### Supplied indium tin oxide sputtering target (`target`) Only actual supplied indium tin oxide sputtering target consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Supplied indium tin oxide sputtering target - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test deionised water (`di`) Only actual factory-test DI water, matching own ion-exchange/RO supply purity, water fraction and temperature/density. Meter supply/returns, retained shipment fill and discharged test water separately; no default ultrapure specification or recovery. - Selected flow: Deionised water `5b3acbab-2518-4406-8736-d21f222d757a` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test high-purity argon gas (`argon`) Only actual factory-test high-purity argon gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test high-purity argon gas - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test high-purity nitrogen gas (`nitrogen`) Only actual factory-test high-purity nitrogen gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test high-purity nitrogen gas - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test helium gas (`helium`) Only actual factory-test helium gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test helium gas - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test high-purity hydrogen gas (`hydrogen`) Only actual factory-test high-purity hydrogen gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test high-purity hydrogen gas - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test gaseous oxygen (`oxygen`) Only actual gaseous oxygen at-plant cryogenic air-separation supply, matched provider/purity/phase and measured factory trial receipts. This industrial interface does not establish electronic high-purity oxygen; no liquid supply without vaporisation accounting. - Selected flow: oxygen `4f19ca15-7b3b-11dd-ad8b-0800200c9a66` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test monosilane gas (`silane`) Only actual pure monosilane SiH4 CAS7803-62-5 gas from the compatible disproportionation supply interface, own electronics-grade purity/provider/phase and cylinder consumption; not an organosilane or universal deposition recipe. - Selected flow: Silane `2b6e6900-7be6-41d1-bda9-060e8303f96f` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test ammonia gas (`ammonia`) Only actual factory-test ammonia gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test ammonia gas - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test nitrogen trifluoride gas (`nf3`) Only actual factory-test nitrogen trifluoride gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test nitrogen trifluoride gas - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test sulfur hexafluoride gas (`sf6`) Only actual factory-test sulfur hexafluoride gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test sulfur hexafluoride gas - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test tetrafluoromethane gas (`cf4`) Only actual factory-test tetrafluoromethane gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test tetrafluoromethane gas - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test octafluorocyclobutane gas (`c4f8`) Only actual factory-test octafluorocyclobutane gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test octafluorocyclobutane gas - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test nitrous oxide gas (`n2o`) Only actual factory-test nitrous oxide gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test nitrous oxide gas - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test tungsten hexafluoride (`wf6`) Only actual factory-test tungsten hexafluoride consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test tungsten hexafluoride - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test dichlorosilane (`sich2`) Only actual factory-test dichlorosilane consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test dichlorosilane - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test tetraethyl orthosilicate (`teos`) Only actual factory-test tetraethyl orthosilicate consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test tetraethyl orthosilicate - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test aqueous hydrofluoric acid (`hf`) Only actual factory-test aqueous hydrofluoric acid consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test aqueous hydrofluoric acid - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test 30% aqueous hydrochloric acid (`hcl`) Only actual 30% aqueous HCl CAS7647-01-0 used in a documented factory acceptance trial, matched provider and own assay/density. It cannot stand for gaseous electronic hydrogen chloride. - Selected flow: Hydrochloric acid (30%) `56414d25-a353-4d67-b362-87212ce6011d` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test hydrogen peroxide solution (`peroxide`) Only actual factory-test hydrogen peroxide solution consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test hydrogen peroxide solution - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test semiconductor silicon wafer (`siwafer`) Only actual factory-test semiconductor silicon wafer consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test semiconductor silicon wafer - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-test positive photoresist (`resist`) Only actual factory-test positive photoresist consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-test positive photoresist - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory-growth-test semiconductor polysilicon (`silicon`) Only actual factory-growth-test semiconductor polysilicon consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory-growth-test semiconductor polysilicon - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory EUV-source-test tin rod feed (`tin`) Only actual compatible metallic tin rod CAS7440-31-5 delivered for an observed EUV-source factory trial with measured own purity and rod-to-melt preparation. Supplier tin rod is not automatically droplet-ready feed; no catalogue pulse-rate consumption. - Selected flow: Tin Rod `e9c72b13-0d60-4d67-a1c9-b0c963ec62cf` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory protective-atmosphere nitrogen (`nitrogenpurge`) Only actual at-plant protective-atmosphere nitrogen used for equipment assembly/purge/inspection with matching provider/purity/gas state. It is not automatically high-purity deposition nitrogen. - Selected flow: Nitrogen gas `50626f35-0e0d-4139-b9f9-7e9ff238ba62` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ###### Factory combustion-abatement natural gas (`ng`) Only actual factory combustion-abatement natural gas consumed in documented equipment factory acceptance, with own purity/assay/phase/provider, pressure/temperature and stocks/returns. Equipment customer processing recipes and lifetime media are excluded; an unresolved supply identity is not a proxy. - Selected flow: Factory combustion-abatement natural gas - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_tests - Sources: asml-manufacture; pva-cz; airliquide-gases; linde-gases ##### Waste flows ##### Elementary flows #### Outputs ##### Product flows ##### Waste flows ##### Elementary flows ### Process: Unassigned shared factory services (`services`) #### Inputs ##### Product flows ###### Factory electricity (`electricity`) Only actual compatible CN user-side <1kV grid-average electricity, common-period fabrication/assembly/cleanroom/factory-test/dispatch meters. Reconcile imports, actual generation, exports/storage and only unassigned service residual. - Selected flow: Alternating current `50657322-939c-4829-a87b-47c093bfa6a7` - Flow property / unit: Energy / kWh - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_utilities - Sources: ###### Factory compressed air (`air`) Actual bought compressed-air volume with own delivery pressure/temperature/humidity and provider. Onsite compressed-air production instead counts own measured power and separate losses once. - Selected flow: Compressed air `46e2b1e4-5a4e-4579-b6a2-65b03f9ce825` - Flow property / unit: Volume / m3 - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_utilities - Sources: ###### Purchased industrial heat (`heat`) Only matching actual CN natural-gas industrial heat supply, own supplied/returned enthalpy on one datum. Deduct gross return once; already-net heat is not reduced twice; supplier fuel stays upstream. - Selected flow: Heat, district or industrial, natural gas `eb581eb3-c707-41a0-b4e6-ee1854551714` - Flow property / unit: Energy / MJ - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_utilities - Sources: ###### Service tap water (`tap`) Actual tap-water supplier and measured common-period service supply/returns, own water fraction/temperature/density; only unassigned shared residual, no duplicated cleaning or test water. - Selected flow: Tap water `d1e0e36c-07f0-4a75-bdcb-efb5d9e2ac36` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_utilities - Sources: ##### Waste flows ##### Elementary flows #### Outputs ##### Product flows ##### Waste flows ##### Elementary flows ### Process: Accepted equipment dispatch and packaging (`dispatch`) #### Inputs ##### Product flows ###### Corrugated packaging board (`board`) Actual C/E/F corrugated board with >=80% fibre, own provider/recycled fraction and measured packing mass outside equipment Dnet. - Selected flow: Corrugated cardboard `8bde297e-98df-463f-bcb4-0db52bf6e0b5` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_dispatch - Sources: cpc; pva-cgs ###### LDPE packaging foil (`film`) Only actual PE-LD non-self-adhesive/noncellular/nonreinforced/nonlaminated/unsupported foil with own thickness/grade/provider; weigh packing outside Dnet. - Selected flow: Low-density polyethylene foil (PE-LD) `2cecd3a7-d90e-44b4-aec5-1d9dfb907477` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_dispatch - Sources: cpc; pva-cgs ###### Dispatch wood pallet (`pallet`) Only actual wood EURO pallet construction/provider and measured mass with documented reuse/return share, outside equipment net mass. - Selected flow: Wooden pallet (EURO) `96b2b9ac-cfb6-46bf-8ad1-c056e338950a` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_dispatch - Sources: cpc; pva-cgs ##### Waste flows ##### Elementary flows #### Outputs ##### Product flows ###### Accepted configured semiconductor or display manufacturing machine (`finished`) One complete accepted machine used solely or principally for the declared semiconductor boule/wafer/device/IC/flat-panel-display manufacturing function, calibrated configured net mass excluding packaging, rejects and consumed trial substrates/media. - Selected flow: Accepted configured semiconductor or display manufacturing machine - Flow property / unit: Mass / kg - Amount rule: 1 kg - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_dispatch - Sources: cpc; pva-cgs ##### Waste flows ##### Elementary flows ### Process: Actual waste transfers and direct emissions (`residues`) #### Inputs ##### Product flows ##### Waste flows ##### Elementary flows #### Outputs ##### Product flows ##### Waste flows ###### Outgoing steel machining scrap (`wsteel`) Only unprocessed actual industrial steel machining scrap leaving site, own alloy/oil/water assay, stock/returns and receiving route; internal recycled stock is separate. - Selected flow: Post-industrial steel scrap `c143745d-be4f-4d8f-b403-2dcbfe685349` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_wastes - Sources: edwards-atlas; edwards-proteus ###### Outgoing copper machining scrap (`wcu`) Only actual weighed copper scrap transfer compatible with hydrometallurgical receiver route, own Cu/alloy/moisture/oil composition, stock/returns and receiver records. - Selected flow: Copper Scrap `4fbbb5f1-560a-4052-ba0c-652c5dfc282e` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_wastes - Sources: edwards-atlas; edwards-proteus ###### Outgoing graphite machining waste (`wgraphite`) Actual weighed outgoing graphite machining waste leaving the equipment manufacturing site: collect its own composition/moisture, stocks/returns and receiving route. The queried unmatched identity remains unavailable; non-air waste is separate from measured air. - Selected flow: Outgoing graphite machining waste - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_wastes - Sources: edwards-atlas; edwards-proteus ###### Outgoing waste quartz crucible (`wquartz`) Only actual waste quartz crucible transferred after equipment factory trial or rejection, own silica/contamination/moisture assay and receiving route; no assumed lifetime replacement. - Selected flow: Waste quartz crucible `3db2ae0b-f79d-42d1-9c1f-7d9594085dbd` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_wastes - Sources: edwards-atlas; edwards-proteus ###### Outgoing spent isopropanol (`spentipa`) Actual weighed outgoing spent isopropanol leaving the equipment manufacturing site: collect its own composition/moisture, stocks/returns and receiving route. The queried unmatched identity remains unavailable; non-air waste is separate from measured air. - Selected flow: Outgoing spent isopropanol - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_wastes - Sources: edwards-atlas; edwards-proteus ###### Outgoing industrial wastewater (`wastewater`) Actual weighed outgoing industrial wastewater leaving the equipment manufacturing site: collect its own composition/moisture, stocks/returns and receiving route. The queried unmatched identity remains unavailable; non-air waste is separate from measured air. - Selected flow: Outgoing industrial wastewater - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_wastes - Sources: edwards-atlas; edwards-proteus ###### Outgoing metal hydroxide sludge (`sludge`) Actual weighed outgoing metal hydroxide sludge leaving the equipment manufacturing site: collect its own composition/moisture, stocks/returns and receiving route. The queried unmatched identity remains unavailable; non-air waste is separate from measured air. - Selected flow: Outgoing metal hydroxide sludge - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_wastes - Sources: edwards-atlas; edwards-proteus ###### Outgoing calcium fluoride waste (`fluoride`) Only actual measured calcium-fluoride waste from observed local factory-test treatment, own CaF2/moisture/contaminant assay and receiving route. Gross mixed sludge is not contained fluoride mass. - Selected flow: Calcium fluoride waste `b0edd7b4-ad53-4d05-8bcd-cdb05a6eae03` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_wastes - Sources: edwards-atlas; edwards-proteus ###### Outgoing silicon factory-test scrap (`testwaste`) Only actual silicon scrap transferred from factory acceptance trials, own Si/dopant/coating/moisture assay, reuse/stock/returns and receiver route; not all mixed test substrates. - Selected flow: Silicon scrap `14ed622c-2306-4edb-b860-2a0779216299` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_wastes - Sources: edwards-atlas; edwards-proteus ###### Transferred collected metal grinding dust (`dust`) Actual weighed transferred collected metal grinding dust leaving the equipment manufacturing site: collect its own composition/moisture, stocks/returns and receiving route. The queried unmatched identity remains unavailable; non-air waste is separate from measured air. - Selected flow: Transferred collected metal grinding dust - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_wastes - Sources: edwards-atlas; edwards-proteus ###### Outgoing LDPE packaging waste (`wfilm`) Actual weighed outgoing ldpe packaging waste leaving the equipment manufacturing site: collect its own composition/moisture, stocks/returns and receiving route. The queried unmatched identity remains unavailable; non-air waste is separate from measured air. - Selected flow: Outgoing LDPE packaging waste - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_wastes - Sources: edwards-atlas; edwards-proteus ##### Elementary flows ###### Fossil carbon dioxide to air (`co2`) Only actual fossil carbon dioxide to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. Fossil origin must be independently documented; supplier electricity/heat emissions remain upstream. - Selected flow: carbon dioxide (fossil) `08a91e70-3ddc-11dd-923d-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Fossil carbon monoxide to air (`co`) Only actual fossil carbon monoxide to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. Fossil origin must be independently documented; supplier electricity/heat emissions remain upstream. - Selected flow: carbon monoxide (fossil) `08a91e70-3ddc-11dd-924e-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Isopropanol to air (`ipair`) Only actual isopropanol to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. - Selected flow: isopropanol `fe0acd60-3ddc-11dd-a843-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Acetone to air (`acetair`) Only actual acetone to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. - Selected flow: acetone `08a91e70-3ddc-11dd-9520-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Water vapour to air (`vapor`) Only actual water vapour to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. - Selected flow: water vapour `fe0acd60-3ddc-11dd-ac04-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Molecular nitrogen dioxide to air (`no2`) Only actual molecular nitrogen dioxide to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. Molecular NO2 is distinct from NOx reported as NO2-equivalent; carbon closure cannot infer it. - Selected flow: nitrogen dioxide `08a91e70-3ddc-11dd-96e5-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### PM10 to air (`pm10`) Only actual pm10 to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. PM10 includes finer fractions; avoid double-counting constituent elemental emissions. - Selected flow: particles (PM10) `08a91e70-3ddc-11dd-91be-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Hydrogen fluoride to air (`hf_air`) Only actual hydrogen fluoride to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. - Selected flow: Hydrogen fluoride to air - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Hydrogen chloride to air (`hcl_air`) Only actual hydrogen chloride to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. - Selected flow: hydrogen chloride `fe0acd60-3ddc-11dd-aab0-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Ammonia to air (`ammonia_air`) Only actual ammonia to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. - Selected flow: ammonia `08a91e70-3ddc-11dd-a2a9-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Nitrogen trifluoride to air (`nf3_air`) Only actual nitrogen trifluoride to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. - Selected flow: nitrogen trifluoride `23bfd19e-9751-4b06-81f4-93b069a3fd56` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Sulfur hexafluoride to air (`sf6_air`) Only actual sulfur hexafluoride to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. - Selected flow: sulphur hexafluoride `fe0acd60-3ddc-11dd-ac51-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Tetrafluoromethane to air (`cf4_air`) Only actual tetrafluoromethane to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. - Selected flow: Tetrafluoromethane to air - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Octafluorocyclobutane to air (`c4f8_air`) Only actual octafluorocyclobutane to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. - Selected flow: Octafluorocyclobutane to air - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Nitrous oxide to air (`n2o_air`) Only actual nitrous oxide to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. - Selected flow: nitrous oxide `08a91e70-3ddc-11dd-94c3-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Copper to air (`copperair`) Only actual copper to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. Gross alloy/oxide/salt mass differs from contained element. Native generic flow covers metal and ions; prefer separately queried matching individual species if the actual LCIA method differentiates them. - Selected flow: copper `fe0acd60-3ddc-11dd-a7a0-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Hexavalent chromium to air (`chromiumair`) Only actual hexavalent chromium to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. Own Cr(VI) assay is required, not total chromium or metallic coating mass. - Selected flow: chromium (vi) `08a91e70-3ddc-11dd-950b-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ###### Nickel to air (`nickelair`) Only actual nickel to air from observed local equipment manufacture or factory acceptance, with species/CAS/origin and ordinary unspecified-air compartment; sample after actual controls with matched concentration, flow, time and state plus independent fugitive measurement. Captured or dissolved species remain non-air. Gross alloy/oxide/salt mass differs from contained element. Native generic flow covers metal and ions; prefer separately queried matching individual species if the actual LCIA method differentiates them. - Selected flow: nickel `08a91e70-3ddc-11dd-96c8-0050c2490048` - Flow property / unit: Mass / kg - Amount rule: Measured attributable native-unit amount divided by accepted configured-machine net mass. - Value mode: foreground_record - Specificity: site_specific - Normalization basis: per 1 kg reference flow - Basis kind: process_output - Evidence kind: collected_record - Collection protocol: cp_emissions - Sources: edwards-atlas; edwards-proteus ## 7. Allocation and Co-product Handling | rule_id | Rule | source_ids | | --- | --- | --- | | allocate_configuration | Separate configurations, fabrication/assembly/test meters and actual accepted outputs first; same-period allocation uses causal measured machine-hours or service demand, never generic catalogue throughput. Include attributable failed trials/rejects/rework in accepted-equipment burdens; paired internal transfers cancel. Recovered sale products and receiver treatment disclose separate allocation without invented avoided burdens. | | ## 8. Foreground Data Collection, Calculation, and Quality Rules ### Data Collection Protocols | protocol_id | process_id | flow_role | record_type | raw_fields | collection_method | unit | frequency | temporal_coverage | site_scope | aggregation_rule | quality_evidence | | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | | cp_mass | dispatch | accepted configured machine | foreground_record | model; configuration; serial; calibrated accepted net masses; Naccepted; Dnet; included options/fills | Use calibrated traceable weighing of the accepted complete machine and its actual supplied configuration, excluding packaging, extra spare stock, rejects and consumed trials; reconcile accepted ledger and sum net masses within one configuration/period. | kg | each actual batch and matched interval | one common production period | same declared configuration and sites | per 1 kg reference flow | calibration; original receipts; own assays; acceptance/BOM; uncertainty | | cp_materials | fabrication | local stock and ingredients | foreground_record | Qattr; own gross mass/assay/moisture/density; stock; returns; reactions; retained hardware; bath/coat/cleaning route | Weigh actual own stock/chemical receipts, use own grade/formulation and each stream assay to reconcile cutting/retention/reaction/recovery/waste stocks and returns; upstream embedded complete-module materials are excluded. | kg | each actual batch and matched interval | one common production period | same declared configuration and sites | per 1 kg reference flow | calibration; original receipts; own assays; acceptance/BOM; uncertainty | | cp_modules | assembly | hardware and retained ingredient interfaces | foreground_record | Qattr; BOM; completion; hardware mass/length; included options/software; separate chemical formula/assay/phase; stock/return/retained fill | Hardware branch weighs or measures actual completed received/installed/returned modules and cable lengths, then documents remaining local work; embedded chemical manufacture is upstream once. Chemical-ingredient branch measures each local added gas/fill/flux separately in its own native units, with own composition/moisture/T/P/density, stocks/reactions/retention/returns. Whole module hardware mass never establishes a chemical amount; actual local joining ingredients remain separate. | native unit | each actual batch and matched interval | one common production period | same declared configuration and sites | per 1 kg reference flow | calibration; original receipts; own assays; acceptance/BOM; uncertainty | | cp_tests | test | actual acceptance media | foreground_record | Qattr; test purpose/configuration; trials/repeats/failures; own chemical/gas/substrate purity/phase/provider; amount/stocks/returns; source/deposition/etch/bond/dice/growth load | Meter or weigh only observed attributable factory acceptance media and utilities, including failed/repeated tests. Measure each species, retained shipment fill and consumed/recovered/returned media independently. Supplier architecture/media listings provide no factory recipe; customer processing and later maintenance remain outside equipment manufacture. | native unit | each actual batch and matched interval | one common production period | same declared configuration and sites | per 1 kg reference flow | calibration; original receipts; own assays; acceptance/BOM; uncertainty | | cp_utilities | services | factory utilities | foreground_record | Qattr; common-period imports; actual generation; exports; storage; process meters; supply/return state/enthalpy | Reconcile common-period imported and actual generated utilities against exports/storage and measured fabrication/assembly/cleanroom/test/dispatch loads; services allocate only unassigned residual. Investigate negative balances without clipping. Gross heat subtracts independently measured return mass times its own enthalpy once on the same datum; net heat never deducts twice. Keep physical water/steam separate from energy and supplier boiler fuel upstream. | native unit | each actual batch and matched interval | one common production period | same declared configuration and sites | per 1 kg reference flow | calibration; original receipts; own assays; acceptance/BOM; uncertainty | | cp_dispatch | dispatch | supplied machine and packing | foreground_record | Qattr; accepted BOM/net mass; packing stock/reuse/returns; supplier/transport; actual included hardware/fill | Measure actual supplied configuration net hardware/fill through cp_mass and weigh each packing material separately with own reuse/return basis. No catalogue option, replacement list or customer operating consumable establishes shipment. | kg | each actual batch and matched interval | one common production period | same declared configuration and sites | per 1 kg reference flow | calibration; original receipts; own assays; acceptance/BOM; uncertainty | | cp_wastes | residues | actual non-air transfers | foreground_record | Qattr; weighed transfers; own composition/moisture/species; stock/returns; receiver; treatment route; water fraction/density | Measure each actual external waste separately, reconcile own wet/dry/composition stocks/reuse/returns and receiver route; contained metals/fluoride differ from gross waste. Actual wastewater uses its own fraction/density/dissolved/suspended load and discharge interface. Captured/dissolved media remain non-air; external receiver emissions are upstream treatment, not fictional site releases. | kg | each actual batch and matched interval | one common production period | same declared configuration and sites | per 1 kg reference flow | calibration; original receipts; own assays; acceptance/BOM; uncertainty | | cp_emissions | residues | each observed emitted species | foreground_record | Qattr; CAS/species/origin/compartment; post-control concentration; matched flow/time; T/P/wet-dry/O2/unit correction; fugitive sampling; control/byproducts | Measure actual species after configured controls as concentration times matched gas/liquid flow and same-period time with actual state corrections plus independent fugitives. Actual inlet/deposited/retained/recovered/destruction/scrubber/sludge stocks are independent; catalogue DRE and unexplained residuals never infer air. Molecular NO2 differs from NOx-equivalent; own elemental assay differs from gross oxide/PM and prevents overlap. | kg | each actual batch and matched interval | one common production period | same declared configuration and sites | per 1 kg reference flow | calibration; original receipts; own assays; acceptance/BOM; uncertainty | ### Calculation Rules | rule_id | Applies to | Formula or rule | Inputs | Output | source_ids | | --- | --- | --- | --- | --- | --- | | normalize_period | all inventory rows | Within one actual configuration/period divide each attributable native-unit exchange total by the sum of calibrated accepted complete-machine net masses; retain raw quantities and uncertainty. | Qattr; Dnet; cp_mass | native-unit amount per kg reference flow | | ### Data Quality Requirements | requirement_id | Applies to | Requirement | Evidence | | --- | --- | --- | --- | | quality_qnd | all inventory rows | Same configuration/period Qattr includes attributable stock/assembly/cleanroom/test/reject/rework burdens; Naccepted counts accepted complete machines and Dnet sums their calibrated net masses. Per-machine exchange=Qattr/Naccepted; actual mean net mass=Dnet/Naccepted; per-kg exchange=Qattr/Dnet. Keep native numerator; no catalogue weight, process throughput or trial duration is a default. | same-configuration calibrated weighing and accepted ledger | | quality_physical | all inventory rows | Every element/species term uses its own gross mass, assay, moisture/wet-dry basis, stocks/reactions/retention/returns; alloy/sludge/solution mass differs from contained elements/chemicals. Each water stream uses own water fraction/density at actual temperature, reactions, retained fill, evaporation, discharge and stocks; paired internal returns cancel. | own stream assay/stock/reaction/state measurements | | quality_solvent | ipa; acetone; spentipa; ipair; acetair; wastewater | Reconcile each solvent’s own assays and stock/retained/recovered/captured/destruction/wastewater/spent-media fates against independent actual air measurement. Capture differs from destruction; non-air and unexplained residual cannot become air. | independent fate measurements | | quality_gases | all inventory rows | Each factory-test gas/precursor requires actual CAS/species, phase/purity/provider/container/vaporisation and cylinder/line stock/return records. Own reaction/byproduct retention and wet-scrubber fates are independent of inlet gas or catalogue DRE. Industrial O2/protective N2 are not electronic-grade by default; electronic supply listing is not factory consumption evidence. | actual suppliers/assays/test and control records | | quality_scope | reference product | Retain entire boule/wafer/device/IC/display principal-function boundary and actual supplied hardware/options/software/retained fills. PVA32-inch crucible is a size; its without-magnet weight is not general Dnet. General DI recycling/chillers/pumps/metrology and independently supplied parts require adjacent review. | actual order/BOM and primary technical originals | | quality_identity | all inventory rows | Match actual published state100/type/native reference internal ID/property/unitgroup, official bilingual name, full classification/chemistry/grade/phase/provider/geography and elementary origin/compartment. Add every actual unlisted material, chemical gas/fuel/refrigerant/fill, module, blade/filter/resin, transport, waste and emission as an independently queried atomic measured exchange. Unresolved reference/components/chemicals/wastes remain gaps; missing differs from zero and not-applicable requires physical evidence. | own full direct identity and supplier/configuration evidence | ## 9. Validation Rules | rule_id | Rule | source_ids | | --- | --- | --- | | validate_scope | Require actual complete configured machine’s principal semiconductor boule/wafer/device/IC/display manufacturing function and equivalent bilingual one-kg net reference; reject graphite hotzone/Al-Si-Ag mixture, independent utility or customer product as full machinery proxy. | cpc | | validate_makebuy | Require actual completed supply/configured BOM and local makebuy/cleanroom/test boundary; reject duplicated embedded module manufacture, assumed catalogue fill/options, customer recipes and lifetime consumables as factory burden. Include attributable failed/repeated trials and rework. | cpc; pva-cz; pva-cgs; ulvac-display; evg-bond; asml-manufacture; asml-products; asml-euv; tel-product; oxford-deposition; oxford-etch; disco-dicer; disco-water; edwards-atlas; edwards-proteus; airliquide-gases; linde-gases | | validate_balances | Require own-stream element/water/solvent balances and post-control species concentration × matched flow/time/state plus independent fugitives. Utility common-period imports/actual generation/exports/storage reconcile assigned meters and only unassigned residual; gross heat deducts independent same-datum return once and net heat never twice. | | | validate_species | Require molecular NO2 rather than NOx-equivalent, actual Cr(VI) rather than total Cr, own contained metal rather than gross salts/oxides, and non-overlapping PM/element accounting. Prefer individually differentiated Ni/Cu species for applicable LCIA methods. Catalogue DRE and chemistry name cannot establish destruction, supply phase, purity or emitted species; captured/dissolved species stay non-air. Report actual performed/skipped checks, findings and completeness. | edwards-atlas; edwards-proteus | ## 10. Published Dataset Profile | Field | Value | | --- | --- | | dataset_role | foreground_data_package | | downstream_use | secondary_dataset; background_dataset; process; lifecyclemodel | | allowed_use | Actual declared configured manufacture of principally dedicated semiconductor boule/wafer/device/IC/display machinery | | excluded_use | Component/utility proxies, customer processed products/recipes, catalogue mass/performance or universal factory gas assumptions | | required_metadata | All reference qualifiers, same-configuration Qattr/Naccepted/Dnet, native units and own assays/state, actual BOM/makebuy/test/provider/transport/receiver/allocation and gaps | | required_quality_disclosure | Measured/estimated/missing, calibrated sampling/uncertainty, physical residuals and identity/scope gaps, actual performed/skipped check completeness | | update_trigger | Machine principal function/configuration/BOM/grade/purity/phase/provider/makebuy/site/period/acceptance or treatment change | ## 11. Data Sources | source_id | type | title | reference | used_for | | --- | --- | --- | --- | --- | | cpc | official_guidance | Central Product Classification Version 3.0, Explanatory Notes | https://unstats.un.org/unsd/classifications/Econ/Download/In%20Text/CPC_Ver_3.0_Exp_Notes_30Jun2025.pdf | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | pva-cz | handbook | Czochralski Process | https://www.pvatepla.com/products-technologies/crystal-growth/czochralski-process/ | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | pva-cgs | handbook | Czochralski crystal growing system CGS1218 | https://www.pvatepla.com/fileadmin/sitepackage/pdf/brochures/PVA_CGS1218.pdf | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | ulvac-display | handbook | SMD vertical sputtering system | https://www.ulvac.co.jp/en/products/sputtering_system/smd-vertical/ | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | evg-bond | handbook | Wafer bonding systems | https://www.evgroup.com/products/bonding/ | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | asml-manufacture | handbook | Manufacturing at ASML | https://www.asml.com/careers/teams/manufacturing | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | asml-products | handbook | ASML lithography products | https://www.asml.com/en/products | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | asml-euv | handbook | EUV lithography systems | https://www.asml.com/en/products/euv-lithography-systems | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | tel-product | handbook | Semiconductor production process | https://www.tel.com/product/ | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | oxford-deposition | handbook | PlasmaPro 100 ICPCVD | https://plasma.oxinst.com/products/icpcvd/plasmapro-100-icpcvd | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | oxford-etch | handbook | Deep Silicon Etch System 100 | https://plasma.oxinst.com/assets/uploads/Estrelas_Brochure.pdf | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | disco-dicer | handbook | DAD3651 Automatic Dicing Saw | https://www.disco.co.jp/eg/products/dicer/dad3651.html | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | disco-water | handbook | DWR1722 DI water recycling unit | https://www.disco.co.jp/eg/products/accessory/dwr1722.html | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | edwards-atlas | handbook | Atlas combustion gas abatement | https://www.edwardsvacuum.com/en-us/semiconductor/our-products/atlas | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | edwards-proteus | handbook | Proteus plasma gas abatement | https://www.edwardsvacuum.com/en-us/semiconductor/our-products/proteus | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | airliquide-gases | handbook | Air Liquide – one supplier for gases, equipment and services: Delivering expertise to Research Centres and Universities | https://uk.airliquide.com/statics/2022-08/ra_nwe_brochure_2_0.pdf | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. | | linde-gases | handbook | First choice for electronics specialty gases worldwide | https://www.linde-gas.com/products-and-services/gases/specialty-gases-for-electronics | Actual primary category/architecture/manufacturing or supply/control interface only; no universal mass, inclusion, recipe, yield, load, life or destruction factor. |