Parts for semiconductor, integrated-circuit and flat-panel-display manufacturing machinery

Lifecycle status: Candidate
Content maturity: Authored methodology
Current version: No published versionLast updated2026-10-05
Readiness: Review required

Methodology and translation states come from the source record; publishing this website does not change their review status.

Content languages

en-US · canonicalzh-CN · Aligned

Status, classification and source details

Readiness

Warnings methodology_not_reviewed Authored methodology is candidate guidance and still requires methodology review.

Classification mapping

CPC 3.0:44943 · exact

Source

library/pcrs/metal-products-machinery-and-equipment/special-purpose-machinery/parts-for-the-goods-of-subclass-44918sha256:c87b2d2e42c0…

1. Scope and Applicability

This PCR develops factory foreground data for accepted parts solely or principally used with machines of subclass44918. Preserve hosts for semiconductor boules/wafers, devices, integrated circuits and flat-panel displays, including mask/reticle manufacture or repair, device/IC assembly and their dedicated lifting, handling, loading and unloading. A supplier semiconductor label or customer address does not establish a machinery-part identity. CPC44943 and its8486.90 context require individual supplied-item review.

The chapter84 exclusions remain explicit: ceramic machinery parts are separately treated in chapter69; technical glass machinery parts in7019/7020 and laboratory glass in7017. A quartz boat, crucible or ceramic ring is not automatically44943. Review actual constituent material, complete composite/assembly character, dedicated fit and applicable exclusion before adopting the finished reference. FPD substrate fabrication is distinct from manufacturing glass, assembling PCBs/electronic components onto the panel, and CRT production. General valves/pumps/robots/electronics, infrastructure, interchangeable tools and consumables require their own boundaries.

UCT documents dedicated weldments and gas-distribution products with stainless steel, aluminium and Hastelloy families, CNC tube bending/cutting, orbital/TIG welding, cleaning, leak checking and CMM. Its facility infrastructure and other high-purity industries are boundary counterexamples. These families do not prove316L tube grade, alloy composition, weld wire or a universally accepted finished manifold. Actual part drawings and principal host fit decide the supplied boundary.

Kyocera documents precision cordierite stages and high-purity ceramic vacuum chucks, polishing plates and CVD-related components. The chuck is not automatically alumina. Its semiconductor packages, chips and optical/general actuator examples do not prescribe tool-part BOM. CoorsTek distinguishes recrystallized and CVD SiC furnace components, Si-impregnated SiC and SiC-coated graphite alternatives, actual forming/casting, firing, precision CNC machining, plasma coating and cleaning. Raw SiC powder, CVD reactants and bought complete coated components are separate interfaces. All ceramic/glass examples remain subject to the explicit classification exclusion.

Ferrotec documents SiFusion polysilicon, high-purity quartz, SiC and precision metal/component assembly plus diamond or ordinary carbide machining alternatives, chemical/pure-water cleaning and surface treatments. Polysilicon is not doped Czochralski monocrystalline rod. Cleaning an existing customer part is a separately declared service/reconditioning scope rather than manufacture of a new part by assumption. CoorsTek glass-substrate or photomask-substrate products and Ferrotec dummy wafers are not automatically machinery reference parts.

Entegris distinguishes PVD, ALD and hybrid oxide coatings for actual chamber walls/showerheads and substrate-dependent preparation. Yttria/alumina coating names do not establish a specific sputtering target, ALD precursor, coating thickness or recipe. Count bought finished coating once; own deposition collects actual species, carrier/reactant gas, target/precursor completion, deposits, spent media, captured residues and measured releases. Customer wafer yield and process plasma are not part-factory quantities.

The reference is1kg calibrated accepted net physical output of one declared complete supplied part configuration. Dnet/Naccepted/M use the same cohort; only actual retained hardware or proven included fill enters Dnet. Packing, rejects, consumed leak/cleaning/qualification media, customer wafers and services are separate. Conditional cards cover observed or potentially required route-specific atomic identities, never a universal material recipe. Actual additional alloys, precursors, abrasives, weld/shield media, seals, components, waste and emitted species need their own bounded directed query and measurement.

2. Product Category Identity

Field	Value
canonical_pcr_id	pcr.metal-products-machinery-and-equipment.special-purpose-machinery.parts-for-the-goods-of-subclass-44918
classification_refs	CPC3.0 44943
covered_products	Accepted parts solely/principally for44918 boule/wafer/device/IC/FPD hosts and mask/reticle manufacture/repair, assembly and dedicated handling, with individual material-exclusion review
excluded_products	Applicable chapter69 ceramic,7017 laboratory and7019/7020 technicalglass exclusions, general independent parts/infrastructure/consumables, customer wafers/products/recipes and cleaning services; not automatically reference parts
representative_product	One actual complete accepted dedicated part supply configuration
production_route	Actual cutting/bending/welding/machining/forming/firing/deposition/cleaning/integration/qualification or bought completed inputs, route-specific rather than universal recipe
market_state	Actual completed part and retained hardware, excluding packing/consumed trial/customer wafer/service

3. Reference Flow

Field	Value
What	Complete accepted part configuration with declared dedicated host and classification boundary
How much	1 kg accepted net physical output
How well	Actual material/supplied completion/dedicated fit/acceptance, no universal performance/netmass
How long or cycle	Manufacture through cohort acceptance, observed factory tests only, not customer wafer lifetime/cycles
reference_flow_link	reference_product

Field	Value
Reference amount	1
Reference product flow	Parts for the goods of subclass 44918 `1b076837-a2aa-4682-9a61-c9a1859b99fd`
Reference flow property	Mass `93a60a56-a3c8-11da-a746-0800200b9a66`
Reference unit group	Units of mass `93a60a57-a4c8-11da-a746-0800200c9a66`
Reference unit	kg
Required qualifiers	Actual sole/principal44918 host/function; material/composite completion and applicable chapter69/7017/7019/7020 exclusions; model/drawing revision/serial cohort; supply completion/geography/period; each make/buy raw/target/precursor/coating interface; included retained hardware/fill measured state/quantity; excluded packing/testconsumption/reject/customerwafer/service; same-cohort calibratedDnet/Naccepted/M andQattr; own assay/stocks/recovery/acceptance

Declare all qualifiers in metadata or equivalent notes; missing qualifiers make the reference incomplete.

One measurement unit is one complete accepted dedicated part of the declared configuration. Unit count and calibrated net mass refer to this part, not its host machine.

4. Measurement and Unit Rules

rule_id	Applies to	Required property	Required unit	Rule
`reference_mass`	reference product	Mass	kg	M = accepted net mass of one complete unit of the same configuration in kg; collect using cp_mass.
`native_numerator`	all inventory rows	actual native reference property	kg; MJ; m; m3	Preserve native numeratorq_ref=q_item/M. Cablem and own same-constructionkg/m only for physical balance; gasm3 actualT/P/wet-dry/density. Additional solidVolume needs actual solid geometry/density, liquid own composition/temperature/density, not generic gasT/P; no power/capacity-to-mass.
`energy_conversion`	electricity and actual heat	Energy	MJ	Measured electricitykWh×3.6=MJ with matching geography/voltage; own supply/return mass/enthalpy/common datum, gross deduct once and net notagain, not customer tool power or supplier boiler fuel.

5. System Boundary

Boundary Abstraction

Field	Value
declared_starting_condition	Actual external raw/completed part receipt by observed make/buy interface
starting_condition_role	foreground_start
product_classification_scope	44918 sole/principal parts across full host scope, individual material/completion/exclusion review
recursive_input_rule	Bought completion embeds upstream once, own raw/operations separate, internal transfers paired
upstream_dataset_requirement	Actual supply grade/formulation/completion/geography/period/treatment matched
disclosure	Factory foreground, no complete cradle-to-gate footprint claim with unfinished upstream

rule_id	Applies to	Rule
`gate`	foreground	Actual part receipt/fabrication/surface preparation/deposition/integration/cleaning/qualification, attributable rejects/rework, packing/wastes/common services through accepted release.
`make_buy`	supplier_interface	Complete bought components/coatings embed upstream once; site manufacture uses separately measured actual raw inputs/reactants and operations. Pair internal transfers. Raw powder, finished target, precursor and finished coated part are different interfaces.
`factory_use`	production	Only actual part-factory leak/CMM/cleanliness/electrical/thermal qualification burden. Consumed test material excludedDnet; retained shipment proven separately. Customer wafer/device/FPD recipes and fab gas throughput are outside.
`bom_extension`	route	Conditional cards require actual grade/formulation/state/provider. Every missing actual alloy/target/precursor/gas/weld medium/component/waste/species receives own bounded directed identity query and collection rule. Unknown differs from zero/absence.
`upstream`	links	Each actual matched supplier geography/completion/period and external treatment needs an upstream interface. Without completed links disclose foreground-only, no complete footprint. Dedicated host and ceramic/glass/general-part exclusions independently reviewed.

Actual architecture and supplied variants

variant	actual_configuration	scope_condition
Dedicated metal/composite parts	Actual declared chamber/showerhead/manifold/stage/housing or dedicated handling/assembly replacementpart	Sole/principal hostfit and complete supplied interface; generic facility infrastructure excluded
Ceramic/glass examples	Actualmaterial/finishedcomposite/suppliedpurpose and chapter69/7017/7019/7020 review	Supplier semiconductor application alone not44943 proof; no automatic quartz/ceramic reference
Surface route	Actual PVD/ALD/CVD/plasma/anodizing preparation and completed coating versus raw inputs	Exact target/precursor/reactants queried and measured, no universal powder/coatingrecipe
Factory release	Actual accepted configured part and calibrated net cohort, observed factory trials	Packing/testconsumption/customer wafers/services separated; retainedfill proven

6. Process Inventory Structure

Process Map

process_id	process_name	inclusion	inclusion_condition	role	quantitative_reference
`fabrication`	Actual dedicated part fabrication	conditional	Only observed metal cutting/bending/welding or ceramic forming/firing/machining and subsequent work on bought blanks; each actual route and supplied completion independently declared	foreground	per 1 kg reference flow
`coating`	Actual surface and coating manufacture	conditional	Only observed PVD/ALD/plasma/anodizing/CVD or other qualified route with its actual target/precursor/reactants and own measured deposition/fates; no universal chemistry	foreground	per 1 kg reference flow
`assembly`	Part integration and precision cleaning	required	Actual retained part components and observed cleaning/inspection; bought complete modules include constituent manufacture once	foreground	per 1 kg reference flow
`qualification`	Part factory qualification	required	Actual leak/CMM/cleanliness/thermal/electrical acceptance, rejects/rework and observed test media; customer semiconductor production excluded	foreground	per 1 kg reference flow
`dispatch`	Accepted part release and packing	required	Actual accepted dedicated part configuration and independently measured transport packing	foreground	per 1 kg reference flow
`services`	Unassigned common manufacturing services	conditional	Only reconciled common-period unassigned utility residual after subprocess attribution	foreground	per 1 kg reference flow

Process: Actual dedicated part fabrication (`fabrication`)

Only observed metal cutting/bending/welding or ceramic forming/firing/machining and subsequent work on bought blanks; each actual route and supplied completion independently declared.

Inputs

Product flows

aluminium billet (`aluminium`)

Only actual measured aluminium billet with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: aluminium billet
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: uct-weldment

316L stainless steel tube (`stainless`)

Only actual measured 316l stainless steel tube with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: 316L stainless steel tube
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: uct-weldment

Hastelloy tube (`hastelloy`)

Only actual measured hastelloy tube with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: Hastelloy tube
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: uct-weldment

fused quartz blank (`quartz`)

Only actual measured fused quartz blank with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: fused quartz blank
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: ferrotec-catalog

alumina ceramic powder (`alumina`)

Actual own fresh raw aluminium oxide candidate active35499 conflicts with raw metal-oxide34220 identity; no compatible supplied preparation explanation. Keep queried gap. Actual powder purity/particle grade/route measured separately; no completechuck/ALD precursor substitution.

Selected flow: alumina ceramic powder
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

aluminium nitride powder (`aln`)

Only actual measured aluminium nitride powder with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: aluminium nitride powder
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

silicon carbide powder (`sic`)

Actual own fresh rawSiC candidate active35499 conflicts with carbide34280 identity; semiconductor purpose alone doesnotresolve classification. Keep queried gap. Actual powder grade/phase/forming versus CVD reactant/finishedboat/impregnatedSiC separately reviewed.

Selected flow: silicon carbide powder
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: coorstek-furnace; coorstek-guide

high purity graphite blank (`graphite`)

Only actual measured high purity graphite blank with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: high purity graphite blank
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: coorstek-guide

single crystal silicon blank (`silicon`)

Only actual doped Czochralski monocrystalline silicon rod matching35470 with supplier verified doping/resistivity/purity/form, used in observed own component machining. Not Ferrotec SiFusion polysilicon, undoped silicon, finished customer wafer or generic silicon blank.

Selected flow: Monocrystalline silicon rod f8ca9a93-74aa-4c4a-9af8-ecbb1875c604
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: ferrotec-catalog

cordierite ceramic blank (`cordierite`)

Only actual measured cordierite ceramic blank with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: cordierite ceramic blank
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: kyocera-stage

PFA resin (`pfa`)

Only actual measured pfa resin with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: PFA resin
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

polyvinyl alcohol binder (`binder`)

Actual polyvinyl alcohol primary polymer with own hydrolysis/molecular grade and measured binder formulation if genuinely used in ceramic forming; not polyvinyl acetate or an assumed universal binder. Track actual burnout reactions and separately queried emitted species/non-air fates; no fixed binder fraction.

Selected flow: Polyvinyl alcohol cea707dd-98a3-451d-bc43-2dcc145091e9
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

diamond abrasive (`diamond`)

Actual industrial diamond dust/powder matching38230, separately verified abrasive grade/particle/form and own consumption/returns. Not complete bonded wheel/interchangeable tool or gemstone. Actual carbide tool alternatives require their own independent identity.

Selected flow: Industrial diamonds, worked, dust and powder of natural or synthetic precious or semi-precious stones 427ace16-590b-4f33-ac11-ad4c130205a9
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: ferrotec-catalog

metal cutting fluid (`cutting_fluid`)

Actual compatible metal-cutting-fluid concentrate and own formulation/dilution/stock records; do not substitute allcoolant or count boughtdilution and concentrate together. Own water and additives separately reconciled.

Selected flow: Cutting Fluid 576d250f-4f36-4385-939d-0f03b8f95a10
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

process water (`water`)

Only actual measured process water with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: Process Water 94a04f7e-2d5c-41f0-b182-d54a3b373a02
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: ferrotec-catalog

electricity medium voltage (`fabrication_electricity`)

Actual CN user1–35kV delivered electricity matching site/provider/period and voltage. kWh×3.6=MJ, Energy native; subprocesses attributed first and common row only residual. No rated customer tool power or cross-geography default.

Selected flow: Alternating current 3d76981f-964a-4865-b588-0e067a2a1163
Flow property / unit: Delivered energy / MJ
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_energy.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_energy
Sources:

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

stainless steel process scrap (`steel_scrap`)

Only actual outgoing stainless steel process scrap with own assay/species/moisture/contamination, weighed transfers/stocks/paired internal returns and disclosed external receiver/treatment. Separate solvent capture and non-air fates; not fresh input or unknown air residual; no default credit. Slag39310 or external316Lsupply doesnotestablish own stainless machiningoffcut.

Selected flow: stainless steel process scrap
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_waste.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_waste
Sources:

aluminium process scrap (`al_scrap`)

Only actual outgoing aluminium process scrap with own assay/species/moisture/contamination, weighed transfers/stocks/paired internal returns and disclosed external receiver/treatment. Separate solvent capture and non-air fates; not fresh input or unknown air residual; no default credit. Match actual cast/contaminated scrap supply and processing/recycling receiver, not every clean wrought scrap.

Selected flow: Aluminium Scrap 96c5f842-ea53-419b-b1cd-c02c479efb45
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_waste.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_waste
Sources:

fused quartz cutting waste (`quartz_waste`)

Only actual outgoing fused quartz cutting waste with own assay/species/moisture/contamination, weighed transfers/stocks/paired internal returns and disclosed external receiver/treatment. Separate solvent capture and non-air fates; not fresh input or unknown air residual; no default credit.

Selected flow: fused quartz cutting waste
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_waste.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_waste
Sources:

alumina ceramic grinding waste (`ceramic_waste`)

Only actual outgoing alumina ceramic grinding waste with own assay/species/moisture/contamination, weighed transfers/stocks/paired internal returns and disclosed external receiver/treatment. Separate solvent capture and non-air fates; not fresh input or unknown air residual; no default credit.

Selected flow: alumina ceramic grinding waste
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_waste.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_waste
Sources:

Elementary flows

particulates PM10 air (`dust`)

Only independently measured particulates pm10 air to ordinary unspecified air, own species/origin; post-control concentration × matched same-period flow/time with T/P/wet-dry/unit corrections plus measured fugitives, or demonstrated species balance including non-air fates. Capture not destruction; unknown residual not air.

Selected flow: particles (PM10) 08a91e70-3ddc-11dd-91be-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_emission.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_emission
Sources:

Process: Actual surface and coating manufacture (`coating`)

Only observed PVD/ALD/plasma/anodizing/CVD or other qualified route with its actual target/precursor/reactants and own measured deposition/fates; no universal chemistry.

Inputs

Product flows

yttrium oxide sputtering target (`yttria`)

Only actual measured yttrium oxide sputtering target with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: yttrium oxide sputtering target
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: entegris-coating

alumina sputtering target (`alumina_target`)

Only actual measured alumina sputtering target with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: alumina sputtering target
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: entegris-coating

argon gas (`argon`)

Identity remains unresolved: gaseous-name candidate has active35499 prepared-chemical classification with empty route/mix/comment, incompatible with34210 rare-gas identity. Do not assign it to elemental Ar; actual grade/purity/phase/provider and manufacturing role still require evidence.

Selected flow: argon gas
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

nitrogen gas (`nitrogen`)

Actual gaseous N2 CAS7727-37-9 air-separation supply with own purity/pressure/provider and observed manufacturing/test role; nativeMass/kg. Propertymean1.25 is not density or recipe. Source does not mandate gas; bought charged component and embedded gas not both imported.

Selected flow: Nitrogen 67bb2ea6-2fd8-43c5-b227-bca12040b773
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

electricity medium voltage (`coating_electricity`)

Selected flow: Alternating current 3d76981f-964a-4865-b588-0e067a2a1163
Flow property / unit: Delivered energy / MJ
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_energy.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_energy
Sources:

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Elementary flows

Process: Part integration and precision cleaning (`assembly`)

Actual retained part components and observed cleaning/inspection; bought complete modules include constituent manufacture once.

Inputs

Product flows

isopropyl alcohol (`ipa`)

Actual isopropylalcohol CAS67-63-0 with own assay/purity/suppliedform matching atplant chemical interface, only observed partfactorycleaning. Own retained/recovered/captured/destroyed/nonair and species airfates independently measured.

Selected flow: Isopropanol a4a75541-e156-4e30-947c-ba067a682afd
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

nitric acid (`nitric`)

Actual supplied40% aqueous nitric acid, CAS7697-37-2, independently compatible industrial/high-purity cleaning interface; gross solution issue and own measured HNO3 assay/water balance separately. General comment commercial68% is not the supplied concentration. Actual part-factory cleaning only; no customer wafer recipe.

Selected flow: Nitric acid bf883501-c052-414e-8e21-e6f53cc257ba
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

hydrofluoric acid (`hf`)

Actual own fresh aqueousHF candidate active35499 conflicts with inorganicacid34231 identity; no compatible supplied preparation explanation. Keep queried gap. Verify actual concentration/purity/phase and own HF/water/fates for observed partcleaning, not customerwafer recipe.

Selected flow: hydrofluoric acid
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

deionised water (`di_water`)

Actual chemical-grade deionized water matching own supplied purity and plant/provider interface, separately measured rinsing/recovery/stocks; no automatic ultra-pure specification or customer wafer rinse quantity.

Selected flow: Deionised water 5b3acbab-2518-4406-8736-d21f222d757a
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources: ferrotec-catalog

electric heating resistor (`heater`)

Actual completed non-carbon electric heating resistor44818 matching physical supplied heater/resistor completion and model fit. Not CTUe reference, carbon QCH heater, whole furnace or power-to-mass conversion; complete bought heated assembly embeds it once.

Selected flow: Electric heating resistors, except of carbon 991da6ee-1a8a-4e77-8f9c-c50615e255e7
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

wafer chuck electrode (`electrode`)

Only actual measured wafer chuck electrode with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: wafer chuck electrode
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

copper electrical cable (`cable`)

Actual <=1000V copper0.6/1kV cable construction and supply completion, native Length/m with own issued/cut/installed/returned/stocks. Only own same-construction measured kg/m converts physical balance; not power-to-mass or generic wire.

Selected flow: Low-voltage cable 49101b44-20cc-46a0-adfb-af07e4cc8908
Flow property / unit: Length / m
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_length.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_length
Sources:

vulcanised nitrile sealing element (`seal`)

Actual vulcanized nitrile rubber sealing element36270 only if own compound/assay/cure state and supplied model fit match. Not all semiconductor seals, PTFE/TPU/FFKM/metal; other compounds require separate identity.

Selected flow: Sealing elements a9943e4e-1a21-412c-859e-df09a2b5ee6f
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

steel threaded fastener (`fastener`)

Only actual measured steel threaded fastener with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: Steel screw 895204f6-6425-4814-afc5-cb97e530e892
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

electricity medium voltage (`assembly_electricity`)

Selected flow: Alternating current 3d76981f-964a-4865-b588-0e067a2a1163
Flow property / unit: Delivered energy / MJ
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_energy.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_energy
Sources:

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

part cleaning wastewater (`effluent`)

Only actual outgoing part cleaning wastewater with own assay/species/moisture/contamination, weighed transfers/stocks/paired internal returns and disclosed external receiver/treatment. Separate solvent capture and non-air fates; not fresh input or unknown air residual; no default credit. Actual acid/metal/solvent species and externalWaste receiver; discharged-to-water elementary interface is not treatmentWaste.

Selected flow: part cleaning wastewater
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_waste.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_waste
Sources:

spent isopropyl alcohol (`solvent_waste`)

Only actual outgoing spent isopropyl alcohol with own assay/species/moisture/contamination, weighed transfers/stocks/paired internal returns and disclosed external receiver/treatment. Separate solvent capture and non-air fates; not fresh input or unknown air residual; no default credit. Verify spentIPA/water/contaminant assay and recovered return before external treatment; wasteoil/coolant/distillation residue not automatically spentIPA.

Selected flow: spent isopropyl alcohol
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_waste.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_waste
Sources:

Elementary flows

isopropanol air (`ipa_air`)

Only independently measured isopropanol air to ordinary unspecified air, own species/origin; post-control concentration × matched same-period flow/time with T/P/wet-dry/unit corrections plus measured fugitives, or demonstrated species balance including non-air fates. Capture not destruction; unknown residual not air.

Selected flow: isopropanol fe0acd60-3ddc-11dd-a843-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_emission.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_emission
Sources:

water vapour air (`vapour`)

Only independently measured water vapour air to ordinary unspecified air, own species/origin; post-control concentration × matched same-period flow/time with T/P/wet-dry/unit corrections plus measured fugitives, or demonstrated species balance including non-air fates. Capture not destruction; unknown residual not air.

Selected flow: water vapour fe0acd60-3ddc-11dd-ac04-0050c2490048
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_emission.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_emission
Sources:

Process: Part factory qualification (`qualification`)

Actual leak/CMM/cleanliness/thermal/electrical acceptance, rejects/rework and observed test media; customer semiconductor production excluded.

Inputs

Product flows

helium leak test gas (`helium`)

Only actual measured helium leak test gas with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: helium leak test gas
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

process water (`test_water`)

Selected flow: Process Water 94a04f7e-2d5c-41f0-b182-d54a3b373a02
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

electricity medium voltage (`qualification_electricity`)

Selected flow: Alternating current 3d76981f-964a-4865-b588-0e067a2a1163
Flow property / unit: Delivered energy / MJ
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_energy.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_energy
Sources:

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Elementary flows

Process: Accepted part release and packing (`dispatch`)

Actual accepted dedicated part configuration and independently measured transport packing.

Inputs

Product flows

corrugated cardboard box (`cardboard`)

Actual finished corrugatedC/E/F packingbox with at least80percent recycledfibres matching supplied construction. Weigh ownbox; no contents/voidvolume-to-mass. Exclude transportpacking fromDnet.

Selected flow: Corrugated cardboard 8bde297e-98df-463f-bcb4-0db52bf6e0b5
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

LDPE packaging foil (`film`)

Actual PE-LD non-self-adhesive noncellular nonreinforced nonlaminated unsupported packing film/foil of verified supplied state and grade, referenceinternal1 Mass/kg; no arbitraryPEfilm or semiconductor protective polymer.

Selected flow: Low-density polyethylene foil (PE-LD) 2cecd3a7-d90e-44b4-aec5-1d9dfb907477
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

wood pallet (`pallet`)

Actual compatible woodenEUROpallet supplied/used mass and stocks/returns, not generic metal/plasticpallet or assumed fixedpalletweight. Transportpacking outsideDnet.

Selected flow: Wooden pallet (EURO) 96b2b9ac-cfb6-46bf-8ad1-c056e338950a
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

electricity medium voltage (`dispatch_electricity`)

Selected flow: Alternating current 3d76981f-964a-4865-b588-0e067a2a1163
Flow property / unit: Delivered energy / MJ
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_energy.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_energy
Sources:

Waste flows

Elementary flows

Outputs

Product flows

parts for semiconductor manufacturing equipment (`reference_product`)

Actual accepted finished part solely/principally for the declared44918 host and compatible8486.90 boundary. Individually review chapter69 ceramic and technical/laboratory glass exclusions, composite completion and dedicated fit. No generic component, infrastructure, consumable, customer wafer, service, packing or test consumption as reference mass.

Selected flow: Parts for the goods of subclass 44918 1b076837-a2aa-4682-9a61-c9a1859b99fd
Flow property / unit: Mass / kg
Amount rule: 1 kg
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_mass
Sources: un-cpc-44943; census-semiconductor

Waste flows

Elementary flows

Process: Unassigned common manufacturing services (`services`)

Only reconciled common-period unassigned utility residual after subprocess attribution.

Inputs

Product flows

electricity medium voltage (`electricity`)

Selected flow: Alternating current 3d76981f-964a-4865-b588-0e067a2a1163
Flow property / unit: Delivered energy / MJ
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_energy.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_energy
Sources:

district industrial natural gas heat (`heat`)

Actual purchased CN natural-gas district/industrial heat matching delivered gross-calorific Energy/MJ interface and own supplier/period. Independently measured supply/return mass and own enthalpy/common datum; subtract once only gross invoice, not again net invoice. Supplier boiler fuel not onsite combustion.

Selected flow: Heat, district or industrial, natural gas eb581eb3-c707-41a0-b4e6-ee1854551714
Flow property / unit: Delivered energy / MJ
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_energy.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_energy
Sources:

tap water (`tap_water`)

Only actual measured tap water with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.

Selected flow: Tap water d1e0e36c-07f0-4a75-bdcb-efb5d9e2ac36
Flow property / unit: Mass / kg
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_material.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_material
Sources:

compressed air (`compressed_air`)

Actual supplied compressed air nativeVolume/m3 with own reference and observed pressure/temperature/wet-dry/composition, metered delivery/returns. Same-state density for physical balances only; no generic T/P conversion of solid volume or catalogue flow-hours.

Selected flow: Compressed air 46e2b1e4-5a4e-4579-b6a2-65b03f9ce825
Flow property / unit: Volume / m3
Amount rule: Apply normalize_mass to q_item; reference_mass; cp_gas.
Value mode: Foreground record (foreground_record)
Specificity: Site-specific (site_specific)
Normalization basis: per 1 kg reference flow; collected per one accepted finished unit
Basis kind: Reference flow (reference_flow)
Evidence kind: Collected record (collected_record)
Collection protocol: cp_gas
Sources:

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Elementary flows

7. Allocation and Co-product Handling

rule_id	Applies to	Rule	source_ids
`causal`	site	Separate configurations and subdivisions first; allocate common residual by measured causal load, operating time or appropriate physical driver, retain numerator and denominator records and uncertainty. Do not average unrelated machining functions or different supplied configurations or use part mass automatically for every utility.
`rejects`	accepted	Include actual rejects, rework and qualification burdens in attributable Q for accepted output; only accepted net mass/count enters denominator. Segregate recycling transfer and treatment; do not assume avoided-product credits or zero upstream recycled burden.

8. Foreground Data Collection, Calculation, and Quality Rules

Data Collection Protocols

protocol_id	process_id	flow_role	record_type	raw_fields	collection_method	unit	frequency	temporal_coverage	site_scope	aggregation_rule	quality_evidence
cp_mass	dispatch	reference product	weighing	model; configuration; serial number; accepted net mass M	Weigh the accepted complete unit on a calibrated scale, excluding transport packaging; reconcile the same configuration and acceptance record.	kg	each accepted lot	common manufacturing period	same configuration/site	accepted net mass per unit	calibration/tare/included accessories/acceptance
cp_material	all	actual inputs	meter_issue	specific species/grade; supplied state; issue; each moisture/density/assay; make/buy; stocks; Q; N	Reconcile each exchange metering/stores/recipe and paired returns in common period; Q includes rejects/rework and each term own assay.	kg	each batch or continuous meter	common manufacturing period	same configuration/site and supplier	attributable quantity / accepted units	grade/composition tests/meters/stocks
cp_energy	all	electricity and heat	meter	process meters; gross imports; actual generation; exports; storage; each supply/return steam mass pressure temperature enthalpy; net invoice; Q; N	Reconcile process meters in same period/units; shared services only unassigned residual, investigate negative residual. Each steam supply/return uses own kg and MJ/kg/common zero, return deducted once.	MJ	continuous meters/each test	common manufacturing period	same configuration/site	attributable energy / accepted units	calibrated meters/delivery interface/thermodynamics/allocation uncertainty
cp_waste	all	specific waste	transfer	each stream mass and own moisture/assay; beginning/end stocks; internal return; external treatment; Q; N	Weigh/sample treatment transfers, distinguish return/reuse/recycling/disposal without assumed substitution credit.	kg	each transfer lot	common manufacturing period	same configuration/site and treatment interface	attributable waste / accepted units	waste tickets/sampling/stocks
cp_emission	all	specific species/compartment	species_measurement	actual species/compartment; concentration; exhaust or liquid flow; wet/dry temperature/pressure; capture/destruction; own assays; Q; N	Use matched species/compartment measured or verified actual technology factors; investigate closure, capture not destruction, residual not air emission.	kg	actual tests/emission periods	common manufacturing period	same configuration/site boundary	attributable emission / accepted units	sampling/flow/combined uncertainty
cp_gas	all	specific supplied gas	meter	compressed-air identity; delivered volume; actual T/P or standard conditions; density; Q; N	Meter compressed-air volume at actual state; mass conversion uses corresponding measured density, not a generic gas factor.	m3	each batch/continuous meter	common manufacturing period	same configuration/supply interface	attributable volume / accepted units	T/P/flow/density/calibration
cp_length	assembly	specific native-length cable	length_measurement	cable construction; conductor/insulation; supplier; issued/cut/installed/returned length; own kg/m; Q; N	Measure actual matching cable length, paired returns and stocks; same-construction measured kg/m only for physical mass balance. Native m retained, never infer mass from electrical rating.	m	each installation lot	common manufacturing period	same component configuration/site and supplier	attributable length / accepted units	construction/length/stock/mass records

The weighing protocol applies to the declared accepted part and excludes transport packing.

Raw-period protocol: N is accepted count of the same configuration, D the sum of calibrated accepted net masses, M=D/N. Each Q is the attributable common-period exchange including reject, rework and factory-test burden; first q_item=Q/N then q_ref=Q/D. Packaging/reject mass stays out of D. Retain actual original units, own composition, stocks and reaction records.

Calculation Rules

rule_id	Applies to	Formula or rule	Inputs	Output	source_ids
`normalize_mass`	all inventory rows	q_ref = q_item / M; q_item = exchange amount per one accepted finished unit; q_ref = exchange amount per 1 kg reference flow.	q_item; M; cp_mass	q_ref

Data Quality Requirements

requirement_id	Applies to	Requirement	Evidence
complete_bom	actual configuration	Cover all actual exchanges; separate make/buy/accessories/fills/test charges; gaps explicit	actual BOM/routes/suppliers
supplied_reference_config	actual configuration	Actual accepted finished part solely/principally for the declared44918 host and compatible8486.90 boundary. Individually review chapter69 ceramic and technical/laboratory glass exclusions, composite completion and dedicated fit. No generic component, infrastructure, consumable, customer wafer, service, packing or test consumption as reference mass. Dnet only calibrated net retained physical output; record drawing/revision/serial cohort andNaccepted, no catalogue mass. One accepted unit is one complete accepted dedicated part, not its host machine.	un-cpc-44943; census-semiconductor; actual drawing/shipment/calibration
mass_period	cohort	Same configuration/period/acceptance, calibrated mass/stocks; no cross-family mean	calibration/period ledger
balance_uncertainty	physical balances	Own water fraction/density/assay/reactions/paired returns; compare combined uncertainty	measurement/sampling/reaction/allocation evidence
cohort_raw	cohort	Naccepted, Dnet and Qattr share configuration/period. Dnet sums calibrated accepted net masses; M=Dnet/Naccepted, q_item=Qattr/Naccepted, q_ref=Qattr/Dnet. Qattr includes rejects/rework/factory tests; Dnet excludes packing/rejects/consumed trial charge. Preserve each native numerator unit.	calibration/actual-period ledgers
species_sampling	emissions	Post-control species concentration times matched same-period gas/liquid flow and duration with T/P/wet-dry/unit corrections; fugitives independently measured. Unknown residual not air release, capture not destruction; each metal/chemical/water term uses own assay/water fraction/density/stocks/reactions/paired returns.	actual concentration/flow/period/state records
contained_assay	physical balances	Each input/product/scrap/sludge/liquid/release uses own measured gross mass times own assay and wet/dry basis; gross alloy/sludge is not contained metal. Every water term uses own water fraction and density at actual temperature, including product retention/reaction/evaporation/discharge/beginning-end stocks; internal returns pair/cancel.	term-specific measurement/assay/moisture/stocks
solvent_fates	solvent records	Record recovered return/product retention/captured liquid or media/demonstrated destruction/wastewater separately. Recovered/retained/captured and wastewater/media are non-air fates; capture not destruction. Investigate unknown residual, never turn it into air release.	actual material/sampling/abatement records
utility_residual	energy	Reconcile common-period imports plus actual generation minus exports/storage changes against fabrication/finish/integration/test/dispatch loads; shared row ONLY unassigned residual. Investigate negative residual against period/units/combined uncertainty without clipping.	calibrated subprocess/site meters
heat_return	thermal interface	Gross heat equals measured supply kg times own MJ/kg minus independently measured return kg times return own MJ/kg, with common datum and actual T/P. Gross supply deducts return once; already-net bill never deducts again. Physical steam/condensate mass separate from heat; supplier boiler fuel not onsite combustion.	separate supply/return metering/thermodynamic state/invoice
dust_overlap	actual particulate releases	PM10 is measured gross particulate mass of the specified size fraction. When actually present, independently measure contained crystalline silica or another species; that contained mass is not additional gross particulate mass. Each actual species needs its own identity and measurement row; declare LCIA reporting conventions and prevent repeated full characterization of the same release, without inventing silica release.	actual test-media species/size-fraction sampling and LCIA reporting convention
machine_architecture	actual configuration	Preserve all dedicated boule/wafer/device/IC/FPD hosts, mask/reticle manufacture/repair, device/IC assembly and dedicated handling. Metallic/composite precision parts, integrated stages/manifolds and actual coated components vary; ceramic/glass exclusions reviewed individually.	census-semiconductor; actual host fit/material/part character
test_install_roles	actual configuration	Actual factory leak/cleanliness/CMM/thermal/electrical test media and attributable rejects/rework enterQattr with stocks/recoveries/non-air fates. Consumed tests, customer wafer recipe and packing outsideDnet; retained fills only proven accepted shipment, no capacity assumption.	actual test/acceptance/shipment records
provider_gaps	links	Each actual upstream/treatment matches state/geography/period; unverified not complete footprint	direct records/substitution disclosure

PM10 is measured gross particulate mass of the specified size fraction; a separately measured contained chemical species is not additional gross particulate mass. Add each actual species according to tested medium and release, declare LCIA reporting conventions and prevent repeated full characterization.

requirement_id	Applies to	Requirement	Evidence
optical_acceptance	actual configuration	Actual PVD/ALD/hybrid/plasma/CVD/anodizing and raw-target/precursor/finished-coating supply interfaces separately declared. Substrate and deposited chemistry measured with actual geometry/thickness/density/assay/stocks; no fixed thickness or powder as ALD precursor. Bought coated part embeds coating once.	entegris-coating; actual route/precursor/target/deposition/stock records

Supplied identity and native measurement conditions

requirement_id	Applies to	Requirement	Evidence
qualified_cutting_fluid	cutting_fluid	Actual compatible metal-cutting-fluid concentrate and own formulation/dilution/stock records; do not substitute allcoolant or count boughtdilution and concentrate together. Own water and additives separately reconciled. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_water	water	Only actual measured process water with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_test_water	test_water	Only actual measured process water with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_ipa	ipa	Actual isopropylalcohol CAS67-63-0 with own assay/purity/suppliedform matching atplant chemical interface, only observed partfactorycleaning. Own retained/recovered/captured/destroyed/nonair and species airfates independently measured. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_cable	cable	Actual <=1000V copper0.6/1kV cable construction and supply completion, native Length/m with own issued/cut/installed/returned/stocks. Only own same-construction measured kg/m converts physical balance; not power-to-mass or generic wire. Native property/unit group: 838aaa23-0117-11db-92e3-0800200c9a66; 838aaa22-0117-11db-92e3-0800200c9a66	supplier specification/actual native metering
qualified_seal	seal	Actual vulcanized nitrile rubber sealing element36270 only if own compound/assay/cure state and supplied model fit match. Not all semiconductor seals, PTFE/TPU/FFKM/metal; other compounds require separate identity. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_fastener	fastener	Only actual measured steel threaded fastener with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_heater	heater	Actual completed non-carbon electric heating resistor44818 matching physical supplied heater/resistor completion and model fit. Not CTUe reference, carbon QCH heater, whole furnace or power-to-mass conversion; complete bought heated assembly embeds it once. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_nitrogen	nitrogen	Actual gaseous N2 CAS7727-37-9 air-separation supply with own purity/pressure/provider and observed manufacturing/test role; nativeMass/kg. Propertymean1.25 is not density or recipe. Source does not mandate gas; bought charged component and embedded gas not both imported. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_al_scrap	al_scrap	Only actual outgoing aluminium process scrap with own assay/species/moisture/contamination, weighed transfers/stocks/paired internal returns and disclosed external receiver/treatment. Separate solvent capture and non-air fates; not fresh input or unknown air residual; no default credit. Match actual cast/contaminated scrap supply and processing/recycling receiver, not every clean wrought scrap. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_ipa_air	ipa_air	Only independently measured isopropanol air to ordinary unspecified air, own species/origin; post-control concentration × matched same-period flow/time with T/P/wet-dry/unit corrections plus measured fugitives, or demonstrated species balance including non-air fates. Capture not destruction; unknown residual not air. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_vapour	vapour	Only independently measured water vapour air to ordinary unspecified air, own species/origin; post-control concentration × matched same-period flow/time with T/P/wet-dry/unit corrections plus measured fugitives, or demonstrated species balance including non-air fates. Capture not destruction; unknown residual not air. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_dust	dust	Only independently measured particulates pm10 air to ordinary unspecified air, own species/origin; post-control concentration × matched same-period flow/time with T/P/wet-dry/unit corrections plus measured fugitives, or demonstrated species balance including non-air fates. Capture not destruction; unknown residual not air. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_cardboard	cardboard	Actual finished corrugatedC/E/F packingbox with at least80percent recycledfibres matching supplied construction. Weigh ownbox; no contents/voidvolume-to-mass. Exclude transportpacking fromDnet. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_film	film	Actual PE-LD non-self-adhesive noncellular nonreinforced nonlaminated unsupported packing film/foil of verified supplied state and grade, referenceinternal1 Mass/kg; no arbitraryPEfilm or semiconductor protective polymer. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_pallet	pallet	Actual compatible woodenEUROpallet supplied/used mass and stocks/returns, not generic metal/plasticpallet or assumed fixedpalletweight. Transportpacking outsideDnet. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_electricity	electricity	Actual CN user1–35kV delivered electricity matching site/provider/period and voltage. kWh×3.6=MJ, Energy native; subprocesses attributed first and common row only residual. No rated customer tool power or cross-geography default. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200c9a66; 93a60a57-a3c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_heat	heat	Actual purchased CN natural-gas district/industrial heat matching delivered gross-calorific Energy/MJ interface and own supplier/period. Independently measured supply/return mass and own enthalpy/common datum; subtract once only gross invoice, not again net invoice. Supplier boiler fuel not onsite combustion. Native property/unit group: 93a60a56-a3c8-14da-a746-0800200c9a66; 93a60a57-a3c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_tap_water	tap_water	Only actual measured tap water with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_compressed_air	compressed_air	Actual supplied compressed air nativeVolume/m3 with own reference and observed pressure/temperature/wet-dry/composition, metered delivery/returns. Same-state density for physical balances only; no generic T/P conversion of solid volume or catalogue flow-hours. Native property/unit group: 93a60a56-a3c8-22da-a746-0800200c9a66; 93a60a57-a3c8-12da-a746-0800200c9a66	supplier specification/actual native metering
qualified_di_water	di_water	Actual chemical-grade deionized water matching own supplied purity and plant/provider interface, separately measured rinsing/recovery/stocks; no automatic ultra-pure specification or customer wafer rinse quantity. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_binder	binder	Actual polyvinyl alcohol primary polymer with own hydrolysis/molecular grade and measured binder formulation if genuinely used in ceramic forming; not polyvinyl acetate or an assumed universal binder. Track actual burnout reactions and separately queried emitted species/non-air fates; no fixed binder fraction. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_diamond	diamond	Actual industrial diamond dust/powder matching38230, separately verified abrasive grade/particle/form and own consumption/returns. Not complete bonded wheel/interchangeable tool or gemstone. Actual carbide tool alternatives require their own independent identity. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_nitric	nitric	Actual supplied40% aqueous nitric acid, CAS7697-37-2, independently compatible industrial/high-purity cleaning interface; gross solution issue and own measured HNO3 assay/water balance separately. General comment commercial68% is not the supplied concentration. Actual part-factory cleaning only; no customer wafer recipe. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_silicon	silicon	Only actual doped Czochralski monocrystalline silicon rod matching35470 with supplier verified doping/resistivity/purity/form, used in observed own component machining. Not Ferrotec SiFusion polysilicon, undoped silicon, finished customer wafer or generic silicon blank. Native property/unit group: 93a60a56-a3c8-11da-a746-0800200b9a66; 93a60a57-a4c8-11da-a746-0800200c9a66	supplier specification/actual native metering
qualified_fabrication_electricity	fabrication_electricity	Actual CN user1–35kV delivered electricity matching site/provider/period and voltage. kWh×3.6=MJ, Energy native; subprocesses attributed first and common row only residual. No rated customer tool power or cross-geography default.	matched delivery interface/submeter records
qualified_coating_electricity	coating_electricity	Actual CN user1–35kV delivered electricity matching site/provider/period and voltage. kWh×3.6=MJ, Energy native; subprocesses attributed first and common row only residual. No rated customer tool power or cross-geography default.	matched delivery interface/submeter records
qualified_assembly_electricity	assembly_electricity	Actual CN user1–35kV delivered electricity matching site/provider/period and voltage. kWh×3.6=MJ, Energy native; subprocesses attributed first and common row only residual. No rated customer tool power or cross-geography default.	matched delivery interface/submeter records
qualified_qualification_electricity	qualification_electricity	Actual CN user1–35kV delivered electricity matching site/provider/period and voltage. kWh×3.6=MJ, Energy native; subprocesses attributed first and common row only residual. No rated customer tool power or cross-geography default.	matched delivery interface/submeter records
qualified_dispatch_electricity	dispatch_electricity	Actual CN user1–35kV delivered electricity matching site/provider/period and voltage. kWh×3.6=MJ, Energy native; subprocesses attributed first and common row only residual. No rated customer tool power or cross-geography default.	matched delivery interface/submeter records
outgoing_steel_scrap	steel_scrap	Only actual outgoing stainless steel process scrap with own assay/species/moisture/contamination, weighed transfers/stocks/paired internal returns and disclosed external receiver/treatment. Separate solvent capture and non-air fates; not fresh input or unknown air residual; no default credit. Slag39310 or external316Lsupply doesnotestablish own stainless machiningoffcut.	sampling/weighing/stocks/actual receiver tickets
outgoing_quartz_waste	quartz_waste	Only actual outgoing fused quartz cutting waste with own assay/species/moisture/contamination, weighed transfers/stocks/paired internal returns and disclosed external receiver/treatment. Separate solvent capture and non-air fates; not fresh input or unknown air residual; no default credit.	sampling/weighing/stocks/actual receiver tickets
outgoing_ceramic_waste	ceramic_waste	Only actual outgoing alumina ceramic grinding waste with own assay/species/moisture/contamination, weighed transfers/stocks/paired internal returns and disclosed external receiver/treatment. Separate solvent capture and non-air fates; not fresh input or unknown air residual; no default credit.	sampling/weighing/stocks/actual receiver tickets
outgoing_effluent	effluent	Only actual outgoing part cleaning wastewater with own assay/species/moisture/contamination, weighed transfers/stocks/paired internal returns and disclosed external receiver/treatment. Separate solvent capture and non-air fates; not fresh input or unknown air residual; no default credit. Actual acid/metal/solvent species and externalWaste receiver; discharged-to-water elementary interface is not treatmentWaste.	sampling/weighing/stocks/actual receiver tickets
outgoing_solvent_waste	solvent_waste	Only actual outgoing spent isopropyl alcohol with own assay/species/moisture/contamination, weighed transfers/stocks/paired internal returns and disclosed external receiver/treatment. Separate solvent capture and non-air fates; not fresh input or unknown air residual; no default credit. Verify spentIPA/water/contaminant assay and recovered return before external treatment; wasteoil/coolant/distillation residue not automatically spentIPA.	sampling/weighing/stocks/actual receiver tickets

requirement_id	Applies to	Requirement	Evidence
unconfirmed_aluminium	aluminium	Only actual measured aluminium billet with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.	own supplied-state/specification/measurement
unconfirmed_stainless	stainless	Only actual measured 316l stainless steel tube with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.	own supplied-state/specification/measurement
unconfirmed_hastelloy	hastelloy	Only actual measured hastelloy tube with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.	own supplied-state/specification/measurement
unconfirmed_quartz	quartz	Only actual measured fused quartz blank with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.	own supplied-state/specification/measurement
unconfirmed_alumina	alumina	Actual own fresh raw aluminium oxide candidate active35499 conflicts with raw metal-oxide34220 identity; no compatible supplied preparation explanation. Keep queried gap. Actual powder purity/particle grade/route measured separately; no completechuck/ALD precursor substitution.	own supplied-state/specification/measurement
unconfirmed_aln	aln	Only actual measured aluminium nitride powder with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.	own supplied-state/specification/measurement
unconfirmed_sic	sic	Actual own fresh rawSiC candidate active35499 conflicts with carbide34280 identity; semiconductor purpose alone doesnotresolve classification. Keep queried gap. Actual powder grade/phase/forming versus CVD reactant/finishedboat/impregnatedSiC separately reviewed.	own supplied-state/specification/measurement
unconfirmed_graphite	graphite	Only actual measured high purity graphite blank with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.	own supplied-state/specification/measurement
unconfirmed_cordierite	cordierite	Only actual measured cordierite ceramic blank with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.	own supplied-state/specification/measurement
unconfirmed_pfa	pfa	Only actual measured pfa resin with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.	own supplied-state/specification/measurement
unconfirmed_yttria	yttria	Only actual measured yttrium oxide sputtering target with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.	own supplied-state/specification/measurement
unconfirmed_alumina_target	alumina_target	Only actual measured alumina sputtering target with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.	own supplied-state/specification/measurement
unconfirmed_argon	argon	Identity remains unresolved: gaseous-name candidate has active35499 prepared-chemical classification with empty route/mix/comment, incompatible with34210 rare-gas identity. Do not assign it to elemental Ar; actual grade/purity/phase/provider and manufacturing role still require evidence.	own supplied-state/specification/measurement
unconfirmed_hf	hf	Actual own fresh aqueousHF candidate active35499 conflicts with inorganicacid34231 identity; no compatible supplied preparation explanation. Keep queried gap. Verify actual concentration/purity/phase and own HF/water/fates for observed partcleaning, not customerwafer recipe.	own supplied-state/specification/measurement
unconfirmed_electrode	electrode	Only actual measured wafer chuck electrode with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.	own supplied-state/specification/measurement
unconfirmed_helium	helium	Only actual measured helium leak test gas with independently verified grade, supplied completion, physical state and supplier interface for this part route. Complete bought component includes constituent manufacture once; own manufacture records real raw inputs/operations. No universal recipe.	own supplied-state/specification/measurement

Raw downloads

These files are byte-identical to the canonical files for this revision in the repository.

pcr.en-US.md96 KB · c87b2d2e42c0…
manifest.yaml2.4 KB · fe81c417cf17…
pcr.zh-CN.md80 KB · 23a7c6a7dd10…
structured.yaml98 KB · 0a341de1e35a…

Structured rule index

This index comes from verified structured.yaml and retains the canonical English rule text.

System boundary rules · 5

Rule ID	Applies to	Rule
`gate`	foreground	Actual part receipt/fabrication/surface preparation/deposition/integration/cleaning/qualification, attributable rejects/rework, packing/wastes/common services through accepted release.
`make_buy`	supplier_interface	Complete bought components/coatings embed upstream once; site manufacture uses separately measured actual raw inputs/reactants and operations. Pair internal transfers. Raw powder, finished target, precursor and finished coated part are different interfaces.
`factory_use`	production	Only actual part-factory leak/CMM/cleanliness/electrical/thermal qualification burden. Consumed test material excludedDnet; retained shipment proven separately. Customer wafer/device/FPD recipes and fab gas throughput are outside.
`bom_extension`	route	Conditional cards require actual grade/formulation/state/provider. Every missing actual alloy/target/precursor/gas/weld medium/component/waste/species receives own bounded directed identity query and collection rule. Unknown differs from zero/absence.
`upstream`	links	Each actual matched supplier geography/completion/period and external treatment needs an upstream interface. Without completed links disclose foreground-only, no complete footprint. Dedicated host and ceramic/glass/general-part exclusions independently reviewed.

Allocation rules · 2

Rule ID	Applies to	Rule	Source IDs
`causal`	site	Separate configurations and subdivisions first; allocate common residual by measured causal load, operating time or appropriate physical driver, retain numerator and denominator records and uncertainty. Do not average unrelated machining functions or different supplied configurations or use part mass automatically for every utility.
`rejects`	accepted	Include actual rejects, rework and qualification burdens in attributable Q for accepted output; only accepted net mass/count enters denominator. Segregate recycling transfer and treatment; do not assume avoided-product credits or zero upstream recycled burden.

Validation rules · 9

Rule ID	Applies to	Rule
`identity`	dataset	Verify accepted dedicated44918 part and actual boule/wafer/device/IC/FPD, mask/reticle, assembly or handling host. Explicitly review chapter69 ceramic parts,7019/7020 technical and7017 laboratoryglass, general independent components/infrastructure/consumables. Each exchange own chemistry/grade/supplied state/native property/provider; unknown notzero.
`denominator`	all inventory rows	All inventory uses the same accepted cohort and common period. Verify calibrated accepted net mass and N; reject and packaging mass excluded. Check q_item=Q/N then normalization by same mean M; mixed configurations are invalid.
`double_count`	make_buy	Reconcile complete bought modules versus own materials and operations, retained fills/accessories versus factory consumption, paired internal transfers and external inputs. Count each actual burden once.
`water_close`	physical water records	For each term use its own measured water fraction, density and wet/dry basis: fresh and input moisture plus reaction water and beginning stocks minus final stocks, retained product, discharge and evaporation; internal returns cancel paired. Investigate measured closure against combined sampling/meter/allocation uncertainty; no universal tolerance.
`species_close`	material and chemical records	Close each contained metal/chemical separately using each input, product, scrap, sludge, liquid and release own matched assay and dry/wet basis, reaction stoichiometry and stocks. Gross mass is not contained element. No all-inventory mass rule applies to energy or transport.
`solvent_close`	solvent records	Distinguish retained solvent, recovered return, captured liquid/media, demonstrated destruction, wastewater/non-air residual and actual species air release. Capture is not destruction; an unexplained residual must be investigated, not assigned to air.
`utility_close`	energy records	Reconcile purchased imports, actual on-site generation, exports and storage changes with assigned fabrication/finish/integration/test/dispatch loads in the same period and units. Shared row ONLY unassigned residual; investigate negative residual against period, unit and combined measurement uncertainty without clipping.
`steam_close`	steam and condensate	Use supply kg times supply own MJ/kg and return kg times return own MJ/kg at measured pressure/temperature relative to common zero. If gross supply, subtract return once; if already-net invoice, do not subtract again. Keep physical steam/condensate mass balance independent from energy.
`species_emissions`	air releases	Validate every emitted species and compartment independently. Fuel carbon balance cannot alone establish CO or NOx. NO2 mass is not NOx reported as NO2 equivalent; keep reporting conventions and actual species identities distinct.

Processes and inputs/outputs · 6

Process ID	Process name	Input flows	Output flows
`fabrication`	Actual dedicated part fabrication	16	5
`coating`	Actual surface and coating manufacture	5	0
`assembly`	Part integration and precision cleaning	10	4
`qualification`	Part factory qualification	3	0
`dispatch`	Accepted part release and packing	4	1
`services`	Unassigned common manufacturing services	4	0

Complete field inspector

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Parts for semiconductor, integrated-circuit and flat-panel-display manufacturing machinery

Content languages

Readiness

Classification mapping

Source

1. Scope and Applicability

2. Product Category Identity

3. Reference Flow

4. Measurement and Unit Rules

5. System Boundary

Boundary Abstraction

Actual architecture and supplied variants

6. Process Inventory Structure

Process Map

Process: Actual dedicated part fabrication (fabrication)

Inputs

Product flows

aluminium billet (aluminium)

316L stainless steel tube (stainless)

Hastelloy tube (hastelloy)

fused quartz blank (quartz)

alumina ceramic powder (alumina)

aluminium nitride powder (aln)

silicon carbide powder (sic)

high purity graphite blank (graphite)

single crystal silicon blank (silicon)

cordierite ceramic blank (cordierite)

PFA resin (pfa)

polyvinyl alcohol binder (binder)

diamond abrasive (diamond)

metal cutting fluid (cutting_fluid)

process water (water)

electricity medium voltage (fabrication_electricity)

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

stainless steel process scrap (steel_scrap)

aluminium process scrap (al_scrap)

fused quartz cutting waste (quartz_waste)

alumina ceramic grinding waste (ceramic_waste)

Elementary flows

particulates PM10 air (dust)

Process: Actual surface and coating manufacture (coating)

Inputs

Product flows

yttrium oxide sputtering target (yttria)

alumina sputtering target (alumina_target)

argon gas (argon)

nitrogen gas (nitrogen)

electricity medium voltage (coating_electricity)

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

Elementary flows

Process: Part integration and precision cleaning (assembly)

Inputs

Product flows

isopropyl alcohol (ipa)

nitric acid (nitric)

hydrofluoric acid (hf)

deionised water (di_water)

electric heating resistor (heater)

wafer chuck electrode (electrode)

copper electrical cable (cable)

vulcanised nitrile sealing element (seal)

steel threaded fastener (fastener)

electricity medium voltage (assembly_electricity)

Waste flows

Elementary flows

Outputs

Product flows

Waste flows

part cleaning wastewater (effluent)

spent isopropyl alcohol (solvent_waste)

Elementary flows

isopropanol air (ipa_air)

Process: Actual dedicated part fabrication (`fabrication`)

aluminium billet (`aluminium`)

316L stainless steel tube (`stainless`)

Hastelloy tube (`hastelloy`)

fused quartz blank (`quartz`)

alumina ceramic powder (`alumina`)

aluminium nitride powder (`aln`)

silicon carbide powder (`sic`)

high purity graphite blank (`graphite`)

single crystal silicon blank (`silicon`)

cordierite ceramic blank (`cordierite`)

PFA resin (`pfa`)

polyvinyl alcohol binder (`binder`)

diamond abrasive (`diamond`)

metal cutting fluid (`cutting_fluid`)

process water (`water`)

electricity medium voltage (`fabrication_electricity`)

stainless steel process scrap (`steel_scrap`)

aluminium process scrap (`al_scrap`)

fused quartz cutting waste (`quartz_waste`)

alumina ceramic grinding waste (`ceramic_waste`)

particulates PM10 air (`dust`)

Process: Actual surface and coating manufacture (`coating`)

yttrium oxide sputtering target (`yttria`)

alumina sputtering target (`alumina_target`)

argon gas (`argon`)

nitrogen gas (`nitrogen`)

electricity medium voltage (`coating_electricity`)

Process: Part integration and precision cleaning (`assembly`)

isopropyl alcohol (`ipa`)

nitric acid (`nitric`)

hydrofluoric acid (`hf`)

deionised water (`di_water`)

electric heating resistor (`heater`)

wafer chuck electrode (`electrode`)

copper electrical cable (`cable`)

vulcanised nitrile sealing element (`seal`)

steel threaded fastener (`fastener`)

electricity medium voltage (`assembly_electricity`)

part cleaning wastewater (`effluent`)

spent isopropyl alcohol (`solvent_waste`)

isopropanol air (`ipa_air`)

water vapour air (`vapour`)

Process: Part factory qualification (`qualification`)

helium leak test gas (`helium`)

process water (`test_water`)

electricity medium voltage (`qualification_electricity`)

Process: Accepted part release and packing (`dispatch`)

corrugated cardboard box (`cardboard`)

LDPE packaging foil (`film`)

wood pallet (`pallet`)

electricity medium voltage (`dispatch_electricity`)

parts for semiconductor manufacturing equipment (`reference_product`)

Process: Unassigned common manufacturing services (`services`)

electricity medium voltage (`electricity`)

district industrial natural gas heat (`heat`)

tap water (`tap_water`)

compressed air (`compressed_air`)